MEMS技術：現在および今後の市場

Abstract

Micro-electro-mechanical systems (MEMS) are one of the fastest growing technology areas, with sales of around $5 billion. They are expected to grow at an average annual rate of more than 20% over the rest of the decade.

MEMS are devices that integrate mechanical elements, sensors, actuators, and electronics on a common silicon substrate. Many typically have dimensions in the 1 micron to 100 micron range. They have proven to be a key enabling technology of developments in areas such as transportation, telecommunications and health care, but the range of MEMS applications covers nearly every sector. The most significant advantage of MEMS is their ability to communicate easily with semiconductor chips. Other advantages include MEMS・compact size, reduced power consumption, lower cost, and increased reliability.

The growth in the use of MEMS has also led to the creation of supporting industries in areas such as MEMS design software, design services, specialty fabrication equipment, and fabrication facilities.

This report takes a hard look at the MEMS market and tries to provide a road map to the technologies and applications that are most likely to be successfully commercialized in the next five years. The study therefore will be invaluable to executives operating in a wide array of industries looking to utilize this very important technology.

SCOPE OF STUDY

The report contains:

• Definitions of industry terms and milestones in the development of MEMS
• Current and potential MEMS applications
• Global MEMS market trends, forecasts through 2010, market shares, and industry structure
• Factors that will influence the long-term development of MEMS
• Profiles of the industrys leaders

Table of Contents

• INTRODUCTION
  • STUDY BACKGROUND
  • STUDY GOALS AND OBJECTIVES
  • INTENDED AUDIENCE
  • SCOPE AND FORMAT
  • METHODOLOGY AND INFORMATION SOURCES
  • ANALYST CREDENTIALS
  • RELATED BCC, INC. RESEARCH
  • BCC ONLINE SERVICES
  • DISCLAIMER
• EXECUTIVE SUMMARY
  • Summary Table: GLOBAL FORECAST FOR MEMS MARKET, THROUGH 2010 ($ MILLIONS)
  • Summary Figure: GLOBAL FORECAST FOR MEMS MARKET, 2004-2010 ($ MILLIONS)
• MEMS OVERVIEW
  • GENERAL DESCRIPTION
    • DEFINTIONS
      • MEMS
    • HISTORICAL NOTE
  • MEMS TECHNOLOGIES
    • MATERIALS TECHNOLOGIES
  • Figure 1 GLOBAL SHARE OF MEMS MATERIALS TECHNOLOGIES, 2004 AND 2010 (PERCENT OF TOTAL MEMS SHIPMENTS)
    • Silicon
    • Polymers
    • Metals
    • MANUFACTURING TECHNOLOGIES
      • Micromachining
  • Figure 2 GLOBAL SHARE OF MEMS FABRICATION TECHNOLOGIES, 2004 AND 2010 (PERCENT OF TOTAL MEMS SHIPMENTS)
    • Surface Micromachining
  • Figure 3 SACRIFICIAL LAYER ETCHING
    • Bulk Micromachining
    • LIGA
  • Figure 4 LIGA PROCESS DIAGRAM
    • Wafer Bonding
      • Anodic Bonding
      • Intermediate Layer Assisted Bonding
      • Direct Bonding
    • Flip-Chip Bonding
    • Etching
      • Wet Anisotropic Etching
  • Figure 5 ISOTROPIC VS. ANISOTROPIC ETCHING
    • Dry Etching
      • Reactive Ion Etching
      • Deep Reactive Ion Etching
    • Laser Microfabrication
      • Laser Micromachining
      • Laser-Assisted Chemical Etching
      • Laser Assisted Deposition
      • Stereolithography
      • Laser Surface Modification
      • Laser-Assisted Manipulation and Assembly
        • Laser Microbending.
        • Physical Manipulation of Parts.
        • Laser Joining
    • MEMS TECHNOLOGIES AND APPLICATIONS
  • Table 1 MAJOR MEMS TECHNOLOGIES AND APPLICATIONS
    • ACCELEROMETERS
      • Technologies
        • Operating Mechanism
  • Table 2 MAJOR MEMS ACCELEROMETER TECHNOLOGIES
  • Table 2 (CONTINUED)
    • Capacitive
    • Electromagnetic
    • Piezoelectric
    • Piezoresistive
    • Optical
    • Tunneling
    • Thermal
    • Axes of Measurement
    • Low-g Accelerometers
    • Applications
      • Established Applications
  • Table 3 ESTABLISHED COMMERCIAL ACCELEROMETER APPLICATIONS, 2005
    • Automotive Applications
      • Airbag Actuation
      • Stability Systems
      • Vehicle Navigation
    • Life Sciences
      • Rate Responsive Heart Pacemakers
      • Actigraphs
    • Energy and Environment
      • Oil and Gas Exploration
    • Military/Public Safety
    • Miscellaneous Applications
    • Emerging Applications
  • Table 4 EMERGING ACCELEROMETER APPLICATIONS, 2005
    • Information Technology
      • Hard Disk Drop Protection
    • Consumer Electronics
      • Mobile Phone Operator Interface
      • Game Controller User Interface
      • Digital Camera Image Stabilization Systems
    • Developmental Applications
  • Table 5 DEVELOPMENTAL ACCELEROMETER APPLICATIONS, 2005
    • Information Technology
      • Hard Disk Read/Write Head Tracking Mechanism
    • Consumer Electronics
      • "Smart" Sporting Goods
    • GYROSCOPES
      • Technologies
  • Table 6 MAJOR MEMS GYROSCOPE TECHNOLOGIES
    • Tuning Fork Gyroscope
    • Wine Glass Resonator Gyroscopes
    • Ring Resonator Gyroscopes
    • Vibrating Wheel
    • Spinning Wheel Gyroscope
    • Micro-Optical-Electromechanical Systems (MOEMS) Gyros
      • Interferometric MOEMS Gyroscope
    • Applications
      • Established Applications
  • Table 7 ESTABLISHED GYROSCOPIC MEMS APPLICATIONS, 2005
    • Automotive
      • Vehicle Stabilization Systems
      • Rollover Detection
      • Vehicle Navigation Systems
    • Military/Public Safety
    • Emerging Applications
  • Table 8 EMERGING GYROSCOPIC MEMS APPLICATIONS, 2005
    • Life Sciences
      • "Smart" Wheelchairs
    • Consumer Products
      • Digital Camera Image Stabilization Systems
      • Personal Transportation Devices
    • Developmental
  • Table 9 DEVELOPMENTAL GYROSCOPIC MEMS APPLICATIONS, 2005
    • Consumer Products
      • Robotic Toys
      • Household Robots
    • Other Developmental Applications
      • Mobile Industrial/Service Robots
    • PRESSURE SENSORS
      • Technologies
        • Piezoelectric
      • Applications
        • Established Applications
  • Table 10 ESTABLISHED PRESSURE SENSING MEMS APPLICATIONS, 2005
    • Automotive Applications
      • Manifold Absolute Pressure (MAP) Sensors
      • Tire Pressure Sensors
    • Life Sciences Applications
      • Blood Pressure Monitors
    • Emerging Applications
    • Developmental Applications
      • Consumer Products
        • Appliance Pressure Sensors
    • CHEMICAL AND GAS SENSORS
      • Technologies
        • Electrochemical Sensors
        • Mass Sensors
        • Optical Sensors
      • Applications
        • Established Applications
          • Industrial Leak Detection and Process Control
        • Emerging Applications
        • Developmental Applications
  • Table 11 DEVELOPMENTAL MEMS CHEMICAL AND GAS SENSOR APPLICATIONS, 2005
    • Automotive
    • Exhaust and Cabin Air Quality Sensors
    • Life Sciences
    • Blood Gas Monitors
    • Energy and Environment
    • Portable/Personal Air Quality Detectors
    • Military/Public Safety
    • Chemical Agent Detectors
    • THERMAL MEMS
      • Technologies
        • Thermocouples
        • Thermoresistors
      • Applications
        • Developmental Applications
    • OPTICAL MEMS
      • Technologies
        • Micro-mirrors
        • Diffractive MEMS
        • MEMS Interferometers
        • Actuating Mechanisms
      • Applications
        • Established Applications
  • Table 12 ESTABLISHED OPTICAL MEMS APPLICATIONS, 2005
    • Telecommunications
      • Optical Switches
    • Consumer Products
      • Digital Light Processing Systems
    • Emerging Applications
  • Table 13 EMERGING OPTICAL MEMS APPLICATIONS, 2005
    • Information Technology
      • Maskless Lithography
  • Figure 6 MASKLESS OPTICAL LITHOGRAPHY SYSTEM
    • Other
      • Laser MEMS Barcode Scanners
      • MEMS Infrared Spectrometers
    • Developmental Applications
      • Other
        • Optical MEMS Infrared Imaging Sensor
    • RF MEMS
      • Technologies
      • Applications
        • Established Applications
          • Telecommunications
          • Acoustic Wave Resonator
        • Emerging Applications
          • MEMS RF Switches
          • On-Chip Inductors and Capacitors
        • Developmental Applications
          • On-Chip Antennas and Other MEMS Devices
    • MICROFLUIDIC AND BIO-MEMS
      • Technologies
        • Microchannels
        • Micropumps
          • Mechanical Micropumps
          • Piezoelectric Pumps
          • Pneumatic Pumps
          • Thermopneumatic Pumps
          • Electrostatic Pumps
        • Non-Mechanical Pumps
          • Capillary Pumps
          • Electrohydrodynamic Pumps
          • Electrokinetic Pumps
          • Magneto-Hydrodynamic Pumps
          • Phase Difference Pumps
        • Micronozzles
        • Microvalves
          • Passive Microvalves
          • Active Microvalves
        • Micromixers
          • Active Mixers
          • SAW Mixers
          • Magneto-Hydrodynamic Mixers
          • Passive Mixers
        • Microreactors
      • Applications
        • Established Applications
  • Table 14 ESTABLISHED MICROFLUIDIC MEMS APPLICATIONS, 2005
    • Inkjet printer heads
      • Life Sciences
      • "Labs-on-a Chip"
      • Information Technology
      • Inkjet Printer Cartridges
    • Emerging Applications
  • Table 15 EMERGING MICROFLUIDIC MEMS APPLICATIONS, 2005
    • Life Sciences
      • Biochip Production
    • Information Technology
      • Digital Display Fabrication
    • Developmental Applications
  • Table 16 DEVELOPMENTAL MICROFLUIDIC MEMS APPLICATIONS, 2005
    • Life Sciences
      • Implantable Drug Pumps
    • Information Technology
      • Printable Organic Electronics
    • Military/Public Safety
      • Chemical and Biological Agent Detectors
    • Other
      • Food Quality Testing
    • OTHER MEMS TYPES
      • MEMS Fuel Cells
        • MEMS Technology-Based Fuel Cells
        • MEMS Fuel Cells On a Chip
• PATENT ANALYSIS
  • PATENTS BY TYPE OF MEMS
  • Figure 7 SHARE OF U.S. MEMS-RELATED PATENTS AND PATENT APPLICANTS RELATING TO MEMS (%)
  • Figure 7 (CONTINUED)
    • MEMS PATENT TRENDS OVER TIME
  • Figure 8 TRENDS IN MEMS-RELATED U.S. PATENT ISSUED ANNUALLY, 2000-2005 (NUMBER OF PATENTS GRANTED EACH YEAR)
    • MEMS PATENT ASSIGNEES
      • LARGEST PATENT HOLDERS
  • Table 17 LARGEST U.S. MEMS PATENT AND PATENT APPLICATION HOLDERS (NUMBER OF PATENTS AND PATENT APPLICATIONS)
    • PATENT HOLDERS BY NATIONALITY
  • Figure 9 TOTAL U.S. MEMS PATENT AND PATENT APPLICATION HOLDERS, BY COUNTRY, AS OF DECEMBER 2005 (%)
• GLOBAL MARKET FOR MEMS, 2004-2010
  • OVERALL MARKET SIZE AND SEGMENTATION
    • MARKET SIZE
  • Figure 10 GLOBAL FORECAST OF MEMS SALES TRENDS, 2004-2010 ($ BILLIONS)
    • Comparison with Other Market Estimates
      • Other MEMS Market Projections
  • Table 18 GLOBAL FORECAST FOR MEMS MARKET ACCORDING TO VARIOUS SOURCES, THROUGH 2010 ($ BILLIONS)
  • Table 18 (CONTINUED)
    • Comparable Industries
  • Figure 11 GLOBAL FORECAST OFP MEMS GROWTH RATE COMPARED WITH GROWTH OF SIMILAR TECHNOLOGIES (PROJECTED AAGR%, 2005-2010)
    • MARKET SEGMENTATION
      • MEMS Types
  • Table 19 GLOBAL FORECAST FOR THE MEMS MARKET, THROUGH 2010 ($ MILLIONS)
  • Figure 12 GLOBAL SHARE OF THE MEMS MARKET BY TYPE, 2004 AND 2010 (%)
    • MEMS Application Segments
  • Figure 13 GLOBAL SHARE OF THE MEMS MARKET BY APPLICATION, 2004 AND 2010 (%)
  • Figure 13 (CONTINUED)
    • DETAILED MARKET PROJECTIONS
      • ACCELEROMETERS
        • Summary
  • Table 20 GLOBAL FORECAST OF THE MEMS ACCELEROMETER MARKET, THROUGH 2010 ($ MILLIONS)
  • Figure 14 GLOBAL SHARE OF MEMS ACCLEROMETER SALES BY APPLICATION SEGMENT, 2004 AND 2010 (%)
    • Established Accelerometer Applications
  • Table 21 GLOBAL FORECAST FOR ESTABLISHED ACCELEROMETER MARKET BY APPLICATION TYPE, THROUGH 2010 ($ MILLIONS)
    • Automotive Applications
  • Table 22 GLOBAL FORECAST FOR ESTABLISHED AUTOMOTIVE ACCELEROMETER MARKET BY APPLICATION TYPE, THROUGH 2010 ($ MILLIONS)
    • Airbag Sensors
  • Table 23 GLOBAL FORECAST OF AIRBAG MODULES SHIPMENTS, THROUGH 2010 (MILLION UNITS)
  • Figure 15 GLOBAL FORECAST OF AIRBAG MODULES SHIPMENTS. 2004-2010 (MILLION UNITS)
  • Table 24 GLOBAL FORECAST FOR AIRBAG SENSORS IN MOTOR VEHICLES MARKET BY VOLUME AND VALUE, THROUGH 2010 (MILLIONS)
    • Vehicle Stability Control Systems (VSCs)
  • Table 25 GLOBAL FORECAST OF PRODUCTION FOR VEHICLES EQUIPPED WITH STABILITY CONTROL SYSTEMS, THROUGH 2010 (MILLION VEHICLES)
  • Figure 16 GLOBAL FORECAST OF LIGHT VEHICLES WITH STABILITY CONTROL SYSTEM SALES, 2004-2010 (MILLION VEHICLES)
  • Table 26 GLOBAL FORECAST FOR LOW-G ACCELEROMETERS MARKET USED IN VEHICLE STABILITY CONTROL SYSTEMS BY VOLUME AND VALUE, THROUGH 2010 (MILLIONS)
    • Navigation Systems
  • Table 27 GLOBAL FORECAST FOR SHIPMENTS OF VEHICLE NAVIGATION SYSTEMS WITH INTEGRATED INS, THROUGH 2010 (MILLION VEHICLES)
  • Figure 17 GLOBAL FORECAST OF TOTAL SHIPMENTS FOR VEHICLE NAVIGATION SYSTEMS, 2004-2010 (MILLION SYSTEMS SHIPPED)
  • Table 28 GLOBAL FORECAST FOR MEMS ACCELEROMETERS MARKET USED IN VEHICLE NAVIGATION SYSTEMS BY VOLUME AND VALUE, THROUGH 2010 ($MILLIONS)
    • Life Sciences Applications
  • Table 29 GLOBAL FORECAST FOR ESTABLISHED ACCELEROMETER APPLICATIONS MARKET IN THE LIFE SCIENCES, THROUGH 2010 ($ MILLIONS)
    • Rate Responsive Heart Pacemakers
  • Table 30 GLOBAL SALES OF CARDIAC PACEMAKERS, 2004-2010 (THOUSAND UNITS)
  • Figure 18 GLOBAL FORECAST FOR SALES IN CARDIAC PACEMAKERS, 2004-2010 (THOUSAND UNITS)
  • Table 31 GLOBAL FORECAST FOR ACCELEROMETERS MARKET USED IN RATE RESPONSIVE HEART PACEMAKERS BY VOLUME AND VALUE, THROUGH 2010 (MILLIONS)
    • Activity Monitoring Systems
  • Table 32 GLOBAL FORECAST FOR ACCELEROMETERS MARKET USED IN ACTIGRAPHS, THROUGH 2010 (MILLIONS)
    • Energy
      • Seismic Detection Systems
  • Table 33 GLOBAL FORECAST FOR ACCELEROMETERS MARKET USED IN SEISMIC DETECTION EQUIPMENT, THROUGH 2010 (MILLIONS)
    • Military/Aerospace
  • Table 34 GLOBAL FORECAST OF GPS SYSTEMS MARKET FOR MILITARY/AEROSPACE APPLICATIONS, THROUGH 2010 ($ MILLIONS)
  • Figure 19 GLOBAL FORECAST OF MILITARY/AEROSPACE MARKET FOR GPS SYSTEMS, 2004-2010 ($ MILLIONS)
  • Table 35 GLOBAL FORECAST FOR ACCELEROMETERS MARKET USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2010 (MILLIONS)
    • Other Established Applications
  • Table 36 GLOBAL FORECAST FOR ACCELEROMETERS MARKET USED IN OTHER NON-MILITARY APPLICATIONS, THROUGH 2010 (MILLIONS)
    • Emerging Applications
  • Table 37 GLOBAL FORECAST FOR EMERGING ACCELEROMETER MARKET APPLICATIONS, THROUGH 2010 ($ MILLIONS)
    • Information Technology
      • Hard Disk Drive Drop Protection
  • Table 38 GLOBAL FORECAST FOR SALES OF HARD DISK-EQUIPPED PORTABLE ELECTRONIC DEVICES, THROUGH 2010 (MILLION UNITS)
  • Figure 20 GLOBAL FORECAST FOR SALES OF HARD DISK-EQUIPPED PORTABLE ELECTRONIC DEVICES, 2004-2010 (MILLION UNITS)
  • Table 39 GLOBAL FORECAST FOR MEMS ACCELEROMETERS MARKET IN PORTABLE ELECTRONIC DEVICES, THROUGH 2010 (MILLIONS)
    • Consumer Products
  • Table 40 GLOBAL FORECAST FOR EMERGING ACCELEROMETER APPLICATIONS MARKET IN CONSUMER PRODUCTS, THROUGH 2010 ($ MILLIONS)
    • Mobile phone user interface
    • Electronic gaming user interface
      • Mobile Phone User Interface
  • Table 41 GLOBAL FORECAST FOR SALES OF MOBILE PHONE HANDSETS, THROUGH 2010 (MILLION UNITS)
  • Figure 21 GLOBAL FORECAST OF SALES OF MOBILE PHONE HANDSETS, 2004-2010 (MILLION UNITS)
  • Table 42 GLOBAL FORECAST FOR MEMS ACCELEROMETERS MARKET IN MOBILE PHONE HANDSETS, THROUGH 2010 (MILLIONS)
    • Electronic Gaming User Interface
  • Table 43 GLOBAL FORECAST FOR SALES OF ACCELEROMETER-EQUIPPED VIDEO GAMING DEVICES, THROUGH 2010 (MILLION UNITS)
  • Figure 22 GLOBAL FORECAST FOR SALES OF ACCELEROMETER EQUIPPED VIDEO GAMING DEVICES, 2004-2005, AND 2010 (MILLION UNITS)
  • Table 44 GLOBAL FORECAST FOR MEMS ACCLEROMETERS MARKET IN HANDHELD GAMING DEVICES, THROUGH 2010 (MILLIONS)
    • Digital Camera Image Stabilization Systems
  • Table 45 GLOBAL FORECAST OF DIGITAL CAMERA SALES, THROUGH 2010 (MILLION UNITS)
  • Figure 23 GLOBAL FORECAST OF UNIT SALES OF DIGITAL CAMERAS, 2004-2010 (MILLION UNITS)
  • Table 46 GLOBAL FORECAST FOR MEMS ACCELEROMETERS MARKET IN DIGITAL CAMERA IMAGE STABILIZATION SYSTEMS, THROUGH 2010 (MILLIONS)
    • Developmental Applications
  • Table 47 GLOBAL FORECAST FOR DEVELOPMENTAL ACCELEROMETER MARKET APPLICATIONS, THROUGH 2010 ($ BILLIONS)
    • Information Technology
      • Hard Disk Read/Write Head Tracking Mechanism
  • Table 48 GLOBAL FORECAST FOR MEMS ACCELEROMETER MARKET IN HARD DISK READ/WRITE HEAD TRACKING SYSTEMS, THROUGH 2010 (MILLIONS)
    • Consumer Products
      • "Smart" Sporting Goods
  • Table 49 GLOBAL FORECAST FOR MEMS ACCELEROMETER MARKET IN SMART SPORTING GOODS, THROUGH 2010 (MILLIONS)
    • GYROSCOPES
      • Summary
  • Table 50 GLOBAL FORECAST FOR MEMS GYROSCOPE MARKET BY PRODUCT STAGE, THROUGH 2010 ($ MILLIONS)
  • Figure 24 GLOBAL FORECAST OF MEMS GYROSCOPE SALES BY APPLICATION, 2004 AND 2010 (%)
    • Established Applications
  • Table 51 GLOBAL FORECAST FOR EMERGING GYROSCOPIC MEMS MARKET BY APPLICATION, THROUGH 2010 ($ MILLIONS)
    • Automotive Applications
  • Table 52 GLOBAL FORECAST FOR ESTABLISHED AUTOMOTIVE GYROSCOPIC MEMS MARKET BY APPLICATION, THROUGH 2010 ($ MILLIONS)
    • Stability Control
  • Table 53 GLOBAL FORECAST FOR MEMS GYROSCOPES MARKET USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH 2010 (MILLIONS)
    • Rollover Detection
  • Table 54 GLOBAL FORECAST FOR SALES OF VEHICLES WITH ROLLOVER DETECTION SYSTEMS, THROUGH 2010 (MILLION UNITS)
  • Figure 25 GLOBAL FORECAST FOR SALES OF VEHICLES WITH ROLLOVER DETECTION SYSTEMS, 2004-2010 (MILLION UNITS)
  • Table 55 GLOBAL FORECAST FOR MEMS GYROSCOPES MARKET USED IN VEHICLE ROLLOVER DETECTION SYSTEMS, THROUGH 2010 (MILLIONS)
    • Navigation Systems
  • Table 56 GLOBAL FORECAST OF MEMS GYROSCOPES MARKET USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2010 (MILLIONS)
    • Emerging Applications
  • Table 57 GLOBAL FORECAST FOR EMERGING GYROSCOPIC MEMS MARKET BY APPLICATION, THROUGH 2010 ($ MILLIONS)
    • Life Sciences
      • "Smart Wheelchairs"
      • "Smart Wheelchairs" (Continued)
  • Table 58 GLOBAL FORECAST FOR MEMS GYROSCOPES MARKET IN SMART WHEELCHAIRS, THROUGH 2010 (MILLIONS)
    • Consumer Products
      • Personal Transportation Devices
  • Figure 26 GLOBAL FORECAST OF SEGWAY SALES, 2004-2010 (MILLION UNITS)
  • Table 59 GLOBAL FORECAST FOR MEMS GYROSCOPES MARKET IN SEGWAYS, THROUGH 2010 (MILLIONS)
    • Developmental Applications
  • Table 60 GLOBAL FORECAST FOR DEVELOPMENTAL GYROSCOPIC MARKET BY MEMS APPLICATIONS, THROUGH 2010 ($ MILLIONS)
    • Consumer Products
  • Table 61 GLOBAL FORECAST FOR DEVELOPMENTAL GYROSCOPIC MARKET BY MEMS APPLICATIONS IN CONSUMER PRODUCTS, THROUGH 2010($ MILLIONS)
    • Robotic Toys
  • Figure 27 GLOBAL FORECAST FOR SHIPMENTS OF ROBOTIC TOYS, 2004-2010 ($ MILLIONS)
  • Table 62 GLOBAL FORECAST FOR MEMS GYROSCOPES MARKET IN ROBOTIC TOYS, THROUGH 2010 (MILLIONS)
    • Household Functional Robots
  • Figure 28 GLOBAL FORECAST FOR SALES OF HOUSEHOLD FUNCTIONAL ROBOTS, 2004-2010 (MILLION UNITS)
  • Figure 28 (CONTINUED)
  • Table 63 GLOBAL FORECAST FOR MEMS GYROSCOPES MARKET IN HOUSEHOLD FUNCTIONAL ROBOTS, THROUGH 2010 (MILLIONS)
    • Other Developmental Applications
      • Mobile Industrial/Service Robots
  • Table 64 GLOBAL FORECAST FOR SHIPMENTS OF MOBILE INDUSTRIAL/SERVICE ROBOTS, THROUGH 2010 (UNITS)
  • Figure 29 GLOBAL FORECAST FOR SHIPMENTS OF MOBILE INDUSTRIAL/SERVICE ROBOTS, 2004-2010 (UNITS)
  • Figure 30 GLOBAL SHARE OF MOBILE INDUSTRIAL/SERVICE ROBOT MARKET, 2004
  • Table 65 GLOBAL FORECAST FOR MEMS GYROSCOPES MARKET IN MOBILE INDUSTRIAL/SERVICE ROBOTS, THROUGH 2010 (MILLIONS)
    • OPTICAL MEMS
      • Summary
  • Table 66 GLOBAL FORECAST FOR OPTICAL MEMS MARKET BY PRODUCT STAGE, THROUGH 2010 ($ MILLIONS)
  • Figure 31 GLOBAL SHARE OF OPTICAL MEMS SALES BY APPLICATION, 2004 AND 2010 (%)
  • Figure 31 (CONTINUED)
    • Established Applications
  • Table 67 GLOBAL FORECAST FOR ESTABLISHED OPTICAL MEMS APPLICATIONS MARKET, THROUGH 2010 ($ BILLIONS)
    • Telecommunications
      • MEMS Optical Switches
  • Table 68 GLOBAL FORECAST OF OPTICAL SWITCH SALES, THROUGH 2010 ($ MILLIONS)
  • Figure 32 GLOBAL FORECAST OF OPTICAL SWITCH MARKET, 2004-2010 ($ MILLIONS)
  • Table 69 GLOBAL FORECAST FOR MEMS OPTICAL SWITCHES MARKET, THROUGH 2010 (MILLIONS)
    • Consumer Products
      • Digital Light Projection MEMS
  • Table 70 GLOBAL FORECAST OF DLP TV SALES, THROUGH 2010 (MILLION UNITS)
  • Figure 33 GLOBAL FORECAST FOR SALES OF DLP TV SETS, 20042010 (MILLION UNITS)
  • Table 71 GLOBAL FORECAST FOR DLP MARKET IN HOME ENTERTAINMENT APPLICATIONS, THROUGH 2010 (MILLIONS)
    • Emerging Applications
  • Table 72 GLOBAL FORECAST FOR ESTABLISHED OPTICAL MEMS MARKET BY APPLICATION, THROUGH 2010 ($ BILLIONS)
    • Information Technology
      • Maskless Lithography Systems
  • Table 73 GLOBAL FORECAST FOR OPTICAL MEMS MARKET IN MASKLESS OPTICAL LITHOGRAPHY TOOLS, THROUGH 2010 (MILLIONS)
    • Other Applications
  • Table 74 GLOBAL FORECAST OF OTHER EMERGING OPTICAL MEMS APPLICATIONS, THROUGH 2010 ($ BILLIONS)
    • Laser MEMS Barcode Scanners
  • Table 75 GLOBAL FORECAST FOR OPTICAL MEMS MARKET IN LASER BARCODE SCANNERS, THROUGH 2010 (MILLIONS)
    • Infrared MEMS Spectrometers
  • Table 76 GLOBAL FORECAST FOR OPTICAL MEMS MARKET IN IR SPECTOMETERS, THROUGH 2010 (MILLIONS)
    • Developmental Applications
      • Automotive
        • Optical MEMS Infrared Sensor
  • Table 77 GLOBAL FORECAST FOR OPTICAL MEMS MARKET IN INFRARED SENSORS, THROUGH 2010 (MILLIONS)
    • MICROFLUIDICS
      • Summary
  • Table 78 GLOBAL FORECAST OF MICROFLUIDIC MEMS MARKET BY PRODUCT STAGE, THROUGH 2010 ($ BILLIONS)
  • Figure 34 SHARE OF GLOBAL MICROFLUIDIC MEMS SALES BY APPLICATION, 2004 AND 2010 (%)
    • Established Applications
  • Table 79 GLOBAL FORECAST FOR ESTABLISHED MICROFLUIDIC MEMS MARKET BY APPLICATION, THROUGH 2010 ($ BILLIONS)
    • Life Sciences
  • Table 80 GLOBAL FORECAST FOR ESTABLISHED MICROFLUIDIC MEMS MARKET BY APPLICATIONS IN THE LIFE SCIENCES, THROUGH 201($ MILLIONS)
    • Diagnostic Labs-on-a-Chip (LOC)
  • Table 81 GLOBAL FORECAST FOR MICROFLUIDIC MEMS MARKET IN POC DIAGNOSTIC LOCS, THROUGH 2010 (MILLIONS)
    • Life Sciences Research
  • Table 82 GLOBAL FORECAST FOR MICROFLUIDIC MEMS MARKET IN LIFE SCIENCE RESEARCH APPLICATIONS, THROUGH 2010 (MILLIONS)
    • Information Technology
      • Inkjet Printer Heads
  • Table 83 GLOBAL FORECAST OF INKJET DEVICE SHIPMENTS, THROUGH 2010 (MILLION UNITS)
  • Figure 35 GLOBAL FORECAST FOR SHIPMENTS OF INKJET DEVICES, 2004-2010 (MILLION UNITS)
  • Table 84 GLOBAL FORECAST FOR INFORMATION TECHNOLOGY FLUIDIC MEMS MARKET APPLICATIONS, THROUGH 2010 (MILLIONS)
    • Emerging Applications
  • Table 85 GLOBAL FORECAST FOR EMERGING MICROFLUIDIC MEMS MARKET APPLICATIONS, THROUGH 2010 ($ BILLIONS)
    • Life Sciences
      • Biochip Production
  • Table 86 GLOBAL FORECAST OF BIOCHIP SHIPMENTS, THROUGH 2010 ($ BILLIONS)
  • Figure 36 GLOBAL FORECAST OF TRENDS IN SHIPMENTS OF BIOCHIPS, 2004-2010 ($ BILLIONS)
  • Table 87 GLOBAL FORECAST FOR MICROFLUIDIC MEMS MARKET USED IN BIOCHIP PRODUCTION, THROUGH 2010 (MILLIONS)
    • Information Technology
      • Display Fabrication
  • Table 88 GLOBAL FORECAST FOR MICROFLUIDIC MEMS MARKET USED IN FLAT PANEL DISPLAY PRODUCTION, THROUGH 2010 (MILLIONS)
    • Developing Applications
  • Table 89 GLOBAL FORECAST FOR DEVELOPMENTAL MICROFLUIDIC MEMS MARKET APPLICATIONS, THROUGH 2010 ($ BILLIONS)
    • Information Technology
      • Printable Organic Electronics
  • Figure 37 SHARE OF GLOBAL PRINTED ORGANIC ELECTRONICS MARKET SEGMENTS, 2010 (%)
  • Table 90 GLOBAL FORECAST FOR MICROFLUIDIC MEMS MARKET USED IN PRINTABLE ORGANIC ELECTRONICS, THROUGH 2010 (MILLIONS)
    • Military/Public Safety
      • CBW Detectors
  • Table 91 GLOBAL FORECAST FOR MICROFLUIDIC MEMS MARKET USED IN CBW SENSORS, THROUGH 2010 (MILLIONS)
    • Other
      • Food Testing
  • Table 92 GLOBAL FORECAST FOR MICROFLUIDIC MEMS MARKET USED IN FOOD TESTING APPLICATIONS, THROUGH 2010 (MILLIONS)
    • RF MEMS
      • Summary
  • Table 93 GLOBAL FORECAST FOR RF MEMS MARKET, THROUGH 2010 ($ MILLIONS)
    • Established Applications
      • Telecommunications
        • MEMS Acoustic Wave Resonators
  • Table 94 GLOBAL FORECAST OF SALES MOBILE PHONE HANDSETS, THROUGH 2010 (MILLIONS UNITS)
  • Figure 38 GLOBAL FORECAST OF SALES MOBILE PHONE HANDSETS, 2004-2010 (MILLIONS UNITS)
  • Table 95 GLOBAL FORECAST FOR RF MEMS ACOUSTIC WAVE RESONATORS MARKET, THROUGH 2010 (MILLIONS)
    • Emerging Applications
      • Telecommunications
  • Table 96 GLOBAL FORECAST FOR EMERGING RF MEMS MARKET APPLICATIONS IN TELECOMMUNICATIONS, THROUGH 2010 ($ BILLIONS)
    • RF MEMS Switches
  • Table 97 GLOBAL FORECAST FOR RF MEMS SWITCHES MARKET, THROUGH 2010 (MILLIONS)
    • RF MEMS Capacitors and Inductors
  • Table 98 GLOBAL FORECAST FOR RF MEMS INDUCTORS AND CAPACITORS MARKET, THROUGH 2010 ($ MILLIONS)
    • Developmental Applications
      • Telecommunications
        • Other RF MEMS Applications
  • Table 99 GLOBAL FORECAST FOR OTHER TYPES OF RF MEMS MARKETS, THROUGH 2010 (MILLIONS)
    • MEMS CHEMICAL AND GAS SENSORS
      • Summary
  • Table 100 GLOBAL FORECAST FOR MEMS CHEMICAL AND GAS SENSOR MARKET, THROUGH 2010 ($ MILLIONS)
  • Figure 39 GLOBAL FORECAST FOR MEMS CHEMCIAL AND GAS SENSORS MARKETS, 2010 (%)
    • Established Applications
      • Other Industries
        • Industrial Process Control and Leak Detection
  • Table 101 GLOBAL FORECAST FOR INDUSTRIAL CHEMICAL AND GAS SENSORS MARKET FOR OTHER TYPES OF MEMS, THROUGH 2010 (MILLIONS)
    • Emerging Applications
    • Developmental Applications
  • Table 102 GLOBAL FORECAST FOR DEVELOPMENTAL MEMS CHEMICAL AND GAS SENSOR APPLICATIONS MARKET, THROUGH 2010 ($ MILLIONS)
    • Automotive
      • Exhaust Gas and Cabin Air Quality Sensors
  • Table 103 GLOBAL FORECAST OF CATALYTIC CONVERTER-EQUIPPED VEHICLES PRODUCED, THROUGH 2010 (MILLION UNITS)
  • Figure 40 GLOBAL FORECAST OF VEHICLES EQUIPPED WITH CATALYTIC CONVERTERS, 2004-2010 (MILLION UNITS)
  • Table 104 GLOBAL FORECAST FOR MEMS GAS SENSORS MARKET USED IN AUTOMOTIVE APPLICATIONS, THROUGH 2010 ($ MILLIONS)
    • Life Sciences
      • Blood Gas Monitors
  • Table 105 GLOBAL FORECAST FOR SALES OF BLOOD GAS MONITORS, THROUGH 2010 (UNITS)
  • Figure 41 GLOBAL FORECAST FOR SALES OF BLOOD GAS MONITORS (UNITS)
  • Table 106 GLOBAL FORECAST FOR MEMS BLOOD GAS SENSORS MARKET, THROUGH 2010 (UNITS)
    • Energy and Environment
      • Air Quality Monitoring
  • Table 107 GLOBAL FORECAST FOR AIR POLLUTION MONITORING EQUIPMENT SALES, THROUGH 2010 ($ BILLIONS)
  • Figure 42 GLOBAL FORECAST OF MONITORING AND SENSING EQUIPMENT FOR AIR POLLUTION MARKET, 2004-2010 ($ BILLIONS)
  • Table 108 GLOBAL FORECAST FOR PORTABLE/PERSONAL AIR QUALITY MONITORS MARKET, THROUGH 2010 (MILLIONS)
    • Military/Public Safety
      • Chemical Agent Detectors
  • Table 109 GLOBAL FORECAST FOR MEMS USED IN PORTABLE CW AGENT DETECTORS, THROUGH 2010 (MILLIONS)
    • PRESSURE SENSORS
      • Summary
  • Table 110 GLOBAL FORECAST FOR MEMS PRESSURE SENSOR MARKET, THROUGH 2010 ($ MILLIONS)
  • Figure 43 SHARE OF GLOBAL MEMS PRESSURE SENSOR SALES BY APPLICATION, 2004 AND 2010 (%)
    • Established Applications
  • Table 111 GLOBAL FORECAST FOR ESTABLISHED MEMS MARKET BY PRESSURE SENSOR APPLICATIONS, THROUGH 2010 ($ BILLIONS)
    • Automotive
  • Table 112 GLOBAL FORECAST FOR ESTABLISHED AUTOMOTIVE MEMS PRESSURE SENSOR MARKET, THROUGH 2010 ($ MILLIONS)
    • Manifold Absolute Pressure Sensors
  • Table 113 GLOBAL FORECAST FOR MEMS MANIFOLD ABSOLUTE PRESSURE SENSORS MARKET, THROUGH 2010 (MILLIONS)
    • Tire Pressure Sensors
  • Table 114 GLOBAL FORECAST OF LIGHT VEHICLE PRODUCTION, THROUGH 2010 (MILLION VEHICLES)
  • Figure 44 GLOBAL FORECAST OF LIGHT VEHICLE PRODUCTION, 2004-2010 (MILLION VEHICLES)
  • Table 115 GLOBAL FORECAST FOR MEMS TIRE PRESSURE SENSORS MARKET, THROUGH 2010 (MILLIONS)
    • Life Sciences
      • Blood Pressure Monitors
  • Table 116 GLOBAL FORECAST FOR MEMS BLOOD PRESSURE SENSORS MARKET, THROUGH 2010 (MILLIONS)
    • Developmental Applications
      • Consumer Products
        • Appliance Pressure Sensors
  • Table 117 GLOBAL FORECAST FOR MEMS PRESSURE SENSORS MARKET IN HOME APPLIANCES, THROUGH 2010 (MILLIONS)
• INDUSTRY STRUCTURE AND MARKET SHARES
  • INDUSTRY STRUCTURE
    • NUMBER/SIZE OF FIRMS
  • Figure 45 ESTIMATED MEMS INDUSTRY CONCENTRATION, 2004 (PERCENT OF TOTAL MEMS SHIPMENT)
    • NATIONALITY OF FIRMS
  • Figure 46 MEMS COMPANIES BY NATIONALITY, 2004 (PERCENT OF ALL MEMS COMPANIES WORLDWIDE)
    • CONTRACT MANUFACTURERS
    • OWNERSHIP TRENDS
    • MARKET SHARES
      • OVERALL MEMS MARKET
  • Figure 47 OVERALL MEMS MARKET SHARES, 2004 (PERCENT OF TOTAL MEMS SHIPMENTS)
  • Figure 47 (CONTINUED)
    • SELECTED MEMS SEGMENTS
    • ACCLEROMETERS
  • Figure 48 MEMS ACCELEROMETER MARKET SHARES, 2004 (%)
    • MICROFLUIDIC MEMS
  • Figure 49 MICROFLUIDIC MEMS MARKET SHARES, 2004 (%)
    • OPTICAL MEMS
  • Figure 50 OPTICAL MEMS MARKET SHARES, 2004 (%)
• VENDOR PROFILES
  • ACTIGRAPH LLC
  • ADVANCED BIONICS CORP.
  • AGILENT TECHNOLOGIES, INC.
  • ALCATEL VACUUM TECHNOLOGY
  • ANALOG DEVICES, INC.
  • APPLIED MEMS INC.
  • ARCHANGEL SYSTEMS, INC.
  • BEI TECHNOLOGIES INC.
  • ROBERT BOSCH GMBH
  • BOSTON MICROSYSTEMS, INC.
  • CALIENT NETWORKS
  • CALIPER LIFE SCIENCES
  • CEPHEID THERAPEUTICS
  • COLIBRYS LTD.
  • DELPHI CORP.
  • DISCERA INC.
  • EV GROUP
  • GLIMMERGLASS NETWORKS
  • HEWLETT PACKARD
  • INDEPENDENCE TECHNOLOGY LLC
  • INPUT/OUTPUT INC.
  • INTERMEC TECHNOLOGIES CORP.
  • ION OPTICS, INC.
  • I-STAT CORP.
  • KIONIX, INC.
  • LEXMARK INTERNATIONAL, INC.
  • LITREX CORP.
  • MAGFUSION, INC.
  • MEMSCAP
  • MEMSIC INC.
  • MEMX
  • MICROCHEMICAL SYSTEMS SA
  • MICROCHIPS INC.
  • MICROFAB BREMEN GMBH
  • MICRONIC LASER SYSTEMS AB
  • MICROSENSORS INC.
  • MILLENIAL NET
  • MOTOROLA
  • NANOGEN INC.
  • NEAH POWER SYSTEMS, INC.
  • NIPPON DENSO CORP.
  • NOVASENSOR
  • OLIVETTI S.P.A.
  • PHONE-OR LTD.
  • PLASTIC LOGIC LIMITED
  • SARNOFF CORP.
  • SEGWAY INC.
  • SEIKO EPSON CORP.
  • SENSONOR AS
  • SILEX MICROSYSTEMS AB
  • SILICON DESIGNS, INC
  • SILICON SENSING SYSTEMS
  • SONY CORP.
  • SPHERE MEDICAL LTD.
  • STMICROELECTRONICS
  • SURFACE TECHNOLOGY SYSTEMS PLC
  • SÜSS MICROTEC AG
  • TERAVICTA TECHNOLOGIES, INC.
  • TEXAS INSTRUMENTS INC.
  • TRONICS MICROSYSTEMS SA
  • VTI TECHNOLOGIES OY
  • XEROX CORP.
  • WOWWEE LTD.
• LIST OF TABLES
• Summary Table:
• Table 1 MAJOR MEMS TECHNOLOGIES AND APPLICATIONS
• Table 2 MAJOR MEMS ACCELEROMETER TECHNOLOGIES
• Table 3 ESTABLISHED COMMERCIAL ACCELEROMETER APPLICATIONS, 2005
• Table 4 EMERGING ACCELEROMETER APPLICATIONS, 2005
• Table 5 DEVELOPMENTAL ACCELEROMETER APPLICATIONS, 2005
• Table 6 MAJOR MEMS GYROSCOPE TECHNOLOGIES
• Table 7 ESTABLISHED GYROSCOPIC MEMS APPLICATIONS, 2005
• Table 8 EMERGING GYROSCOPIC MEMS APPLICATIONS, 2005
• Table 9 DEVELOPMENTAL GYROSCOPIC MEMS APPLICATIONS, 2005
• Table 10 ESTABLISHED PRESSURE SENSING MEMS APPLICATIONS, 2005
• Table 11 DEVELOPMENTAL MEMS CHEMICAL AND GAS SENSOR APPLICATIONS, 2005
• Table 12 ESTABLISHED OPTICAL MEMS APPLICATIONS, 2005
• Table 13 EMERGING OPTICAL MEMS APPLICATIONS, 2005
• Table 14 ESTABLISHED MICROFLUIDIC MEMS APPLICATIONS, 2005
• Table 15 EMERGING MICROFLUIDIC MEMS APPLICATIONS, 2005
• Table 16 DEVELOPMENTAL MICROFLUIDIC MEMS APPLICATIONS, 2005
• Table 17 LARGEST U.S. MEMS PATENT AND PATENT APPLICATION HOLDERS (NUMBER OF PATENTS AND PATENT APPLICATIONS)
• Table 18 GLOBAL FORECAST FOR MEMS MARKET ACCORDING TO VARIOUS SOURCES, THROUGH 2010 ($ BILLIONS)
• Table 19 GLOBAL FORECAST FOR THE MEMS MARKET, THROUGH 2010 ($ MILLIONS)
• Table 20 GLOBAL FORECAST OF THE MEMS ACCELEROMETER MARKET, THROUGH 2010 ($ MILLIONS)
• Table 21 GLOBAL FORECAST FOR ESTABLISHED ACCELEROMETER MARKET BY APPLICATION TYPE, THROUGH 2010 ($ MILLIONS)
• Table 22 GLOBAL FORECAST FOR ESTABLISHED AUTOMOTIVE ACCELEROMETER MARKET BY APPLICATION TYPE, THROUGH 2010 ($ MILLIONS)
• Table 23 GLOBAL FORECAST OF AIRBAG MODULES SHIPMENTS, THROUGH 2010 (MILLION UNITS)
• Table 24 GLOBAL FORECAST FOR AIRBAG SENSORS IN MOTOR VEHICLES MARKET BY VOLUME AND VALUE, THROUGH 2010 (MILLIONS)
• Table 25 GLOBAL FORECAST OF PRODUCTION FOR VEHICLES EQUIPPED WITH STABILITY CONTROL SYSTEMS, THROUGH 2010 (MILLION VEHICLES)
• Table 26 GLOBAL FORECAST FOR LOW-G ACCELEROMETERS MARKET USED IN VEHICLE STABILITY CONTROL SYSTEMS BY VOLUME AND VALUE, THROUGH 2010 (MILLIONS)
• Table 27 GLOBAL FORECAST FOR SHIPMENTS OF VEHICLE NAVIGATION SYSTEMS WITH INTEGRATED INS, THROUGH 2010 (MILLION VEHICLES)
• Table 28 GLOBAL FORECAST FOR MEMS ACCELEROMETERS MARKET USED IN VEHICLE NAVIGATION SYSTEMS BY VOLUME AND VALUE, THROUGH 2010 ($MILLIONS)
• Table 29 GLOBAL FORECAST FOR ESTABLISHED ACCELEROMETER APPLICATIONS MARKET IN THE LIFE SCIENCES, THROUGH 2010 ($ MILLIONS)
• Table 30 GLOBAL SALES OF CARDIAC PACEMAKERS, 2004-2010 (THOUSAND UNITS)
• Table 31 GLOBAL FORECAST FOR ACCELEROMETERS MARKET USED IN RATE RESPONSIVE HEART PACEMAKERS BY VOLUME AND VALUE, THROUGH 2010 (MILLIONS)
• Table 32 GLOBAL FORECAST FOR ACCELEROMETERS MARKET USED IN ACTIGRAPHS, THROUGH 2010 (MILLIONS)
• Table 33 GLOBAL FORECAST FOR ACCELEROMETERS MARKET USED IN SEISMIC DETECTION EQUIPMENT, THROUGH 2010 (MILLIONS)
• Table 34 GLOBAL FORECAST OF GPS SYSTEMS MARKET FOR MILITARY/AEROSPACE APPLICATIONS, THROUGH 2010($ MILLIONS)
• Table 35 GLOBAL FORECAST FOR ACCELEROMETERS MARKET USED IN MILITARY/AEROSPACE APPLICATIONS, THROUGH 2010 (MILLIONS)
• Table 36 GLOBAL FORECAST FOR ACCELEROMETERS MARKET USED IN OTHER NON-MILITARY APPLICATIONS, THROUGH 2010 (MILLIONS)
• Table 37 GLOBAL FORECAST FOR EMERGING ACCELEROMETER MARKET APPLICATIONS, THROUGH 2010 ($ MILLIONS)
• Table 38 GLOBAL FORECAST FOR SALES OF HARD DISK-EQUIPPED PORTABLE ELECTRONIC DEVICES, THROUGH 2010 (MILLION UNITS)
• Table 39 GLOBAL FORECAST FOR MEMS ACCELEROMETERS MARKET IN PORTABLE ELECTRONIC DEVICES, THROUGH 2010 (MILLIONS)
• Table 40 GLOBAL FORECAST FOR EMERGING ACCELEROMETER APPLICATIONS MARKET IN CONSUMER PRODUCTS, THROUGH 2010 ($ MILLIONS)
• Table 41 GLOBAL FORECAST FOR SALES OF MOBILE PHONE HANDSETS, THROUGH 2010 (MILLION UNITS)
• Table 42 GLOBAL FORECAST FOR MEMS ACCELEROMETERS MARKET IN MOBILE PHONE HANDSETS, THROUGH 2010 (MILLIONS)
• Table 43 GLOBAL FORECAST FOR SALES OF ACCELEROMETER-EQUIPPED VIDEO GAMING DEVICES, THROUGH 2010 (MILLION UNITS)
• Table 44 GLOBAL FORECAST FOR MEMS ACCLEROMETERS MARKET IN HANDHELD GAMING DEVICES, THROUGH 2010 (MILLIONS)
• Table 45 GLOBAL FORECAST OF DIGITAL CAMERA SALES, THROUGH 2010 (MILLION UNITS)
• Table 46 GLOBAL FORECAST FOR MEMS ACCELEROMETERS MARKET IN DIGITAL CAMERA IMAGE STABILIZATION SYSTEMS, THROUGH 2010 (MILLIONS)
• Table 47 GLOBAL FORECAST FOR DEVELOPMENTAL ACCELEROMETER MARKET APPLICATIONS, THROUGH 2010 ($ BILLIONS)
• Table 48 GLOBAL FORECAST FOR MEMS ACCELEROMETER MARKET IN HARD DISK READ/WRITE HEAD TRACKING SYSTEMS, THROUGH 2010 (MILLIONS)
• Table 49 GLOBAL FORECAST FOR MEMS ACCELEROMETER MARKET IN SMART SPORTING GOODS, THROUGH 2010 (MILLIONS)
• Table 50 GLOBAL FORECAST FOR MEMS GYROSCOPE MARKET BY PRODUCT STAGE, THROUGH 2010 ($ MILLIONS)
• Table 51 GLOBAL FORECAST FOR EMERGING GYROSCOPIC MEMS MARKET BY APPLICATION, THROUGH 2010 ($ MILLIONS)
• Table 52 GLOBAL FORECAST FOR ESTABLISHED AUTOMOTIVE GYROSCOPIC MEMS MARKET BY APPLICATION, THROUGH 2010 ($ MILLIONS)
• Table 53 GLOBAL FORECAST FOR MEMS GYROSCOPES MARKET USED IN VEHICLE STABILITY CONTROL SYSTEMS, THROUGH 2010 (MILLIONS)
• Table 54 GLOBAL FORECAST FOR SALES OF VEHICLES WITH ROLLOVER DETECTION SYSTEMS, THROUGH 2010 (MILLION UNITS)
• Table 55 GLOBAL FORECAST FOR MEMS GYROSCOPES MARKET USED IN VEHICLE ROLLOVER DETECTION SYSTEMS, THROUGH 2010 (MILLIONS)
• Table 56 GLOBAL FORECAST OF MEMS GYROSCOPES MARKET USED IN VEHICLE NAVIGATION SYSTEMS, THROUGH 2010 (MILLIONS)
• Table 57 GLOBAL FORECAST FOR EMERGING GYROSCOPIC MEMS MARKET BY APPLICATION, THROUGH 2010 ($ MILLIONS)
• Table 58 GLOBAL FORECAST FOR MEMS GYROSCOPES MARKET IN SMART WHEELCHAIRS, THROUGH 2010 (MILLIONS)
• Table 59 GLOBAL FORECAST FOR MEMS GYROSCOPES MARKET IN SEGWAYS, THROUGH 2010 (MILLIONS)
• Table 60 GLOBAL FORECAST FOR DEVELOPMENTAL GYROSCOPIC MARKET BY MEMS APPLICATIONS, THROUGH 2010 ($ MILLIONS)
• Table 61 GLOBAL FORECAST FOR DEVELOPMENTAL GYROSCOPIC MARKET BY MEMS APPLICATIONS IN CONSUMER PRODUCTS, THROUGH 2010 ($ MILLIONS)
• Table 62 GLOBAL FORECAST FOR MEMS GYROSCOPES MARKET IN ROBOTIC TOYS, THROUGH 2010 (MILLIONS)
• Table 63 GLOBAL FORECAST FOR MEMS GYROSCOPES MARKET IN HOUSEHOLD FUNCTIONAL ROBOTS, THROUGH 2010 (MILLIONS)
• Table 64 GLOBAL FORECAST FOR SHIPMENTS OF MOBILE INDUSTRIAL/SERVICE ROBOTS, THROUGH 2010 (UNITS)
• Table 65 GLOBAL FORECAST FOR MEMS GYROSCOPES MARKET IN MOBILE INDUSTRIAL/SERVICE ROBOTS, THROUGH 2010 (MILLIONS)
• Table 66 GLOBAL FORECAST FOR OPTICAL MEMS MARKET BY PRODUCT STAGE, THROUGH 2010 ($ MILLIONS)
• Table 67 GLOBAL FORECAST FOR ESTABLISHED OPTICAL MEMS APPLICATIONS MARKET, THROUGH 2010 ($ BILLIONS)
• Table 68 GLOBAL FORECAST OF OPTICAL SWITCH SALES, THROUGH 2010 ($ MILLIONS)
• Table 69 GLOBAL FORECAST FOR MEMS OPTICAL SWITCHES MARKET, THROUGH 2010 (MILLIONS)
• Table 70 GLOBAL FORECAST OF DLP TV SALES, THROUGH 2010 (MILLION UNITS)
• Table 71 GLOBAL FORECAST FOR DLP MARKET IN HOME ENTERTAINMENT APPLICATIONS, THROUGH 2010 (MILLIONS)
• Table 72 GLOBAL FORECAST FOR ESTABLISHED OPTICAL MEMS MARKET BY APPLICATION, THROUGH 2010 ($ BILLIONS)
• Table 73 GLOBAL FORECAST FOR OPTICAL MEMS MARKET IN MASKLESS OPTICAL LITHOGRAPHY TOOLS, THROUGH 2010 (MILLIONS)
• Table 74 GLOBAL FORECAST OF OTHER EMERGING OPTICAL MEMS APPLICATIONS, THROUGH 2010 ($ BILLIONS)
• Table 75 GLOBAL FORECAST FOR OPTICAL MEMS MARKET IN LASER BARCODE SCANNERS, THROUGH 2010 (MILLIONS)
• Table 76 GLOBAL FORECAST FOR OPTICAL MEMS MARKET IN IR SPECTOMETERS, THROUGH 2010 (MILLIONS)
• Table 77 GLOBAL FORECAST FOR OPTICAL MEMS MARKET IN INFRARED SENSORS, THROUGH 2010 (MILLIONS)
• Table 78 GLOBAL FORECAST OF MICROFLUIDIC MEMS MARKET BY PRODUCT STAGE, THROUGH 2010 ($ BILLIONS)
• Table 79 GLOBAL FORECAST FOR ESTABLISHED MICROFLUIDIC MEMS MARKET BY APPLICATION, THROUGH 2010 ($ BILLIONS)
• Table 80 GLOBAL FORECAST FOR ESTABLISHED MICROFLUIDIC MEMS MARKET BY APPLICATIONS IN THE LIFE SCIENCES, THROUGH 2010 ($ MILLIONS)
• Table 81 GLOBAL FORECAST FOR MICROFLUIDIC MEMS MARKET IN POC DIAGNOSTIC LOCS, THROUGH 2010 (MILLIONS)
• Table 82 GLOBAL FORECAST FOR MICROFLUIDIC MEMS MARKET IN LIFE SCIENCE RESEARCH APPLICATIONS, THROUGH 2010 (MILLIONS)
• Table 83 GLOBAL FORECAST OF INKJET DEVICE SHIPMENTS, THROUGH 2010 (MILLION UNITS)
• Table 84 GLOBAL FORECAST FOR INFORMATION TECHNOLOGY FLUIDIC MEMS MARKET APPLICATIONS, THROUGH 2010 (MILLIONS)
• Table 85 GLOBAL FORECAST FOR EMERGING MICROFLUIDIC MEMS MARKET APPLICATIONS, THROUGH 2010 ($ BILLIONS)
• Table 86 GLOBAL FORECAST OF BIOCHIP SHIPMENTS, THROUGH 2010 ($ BILLIONS)
• Table 87 GLOBAL FORECAST FOR MICROFLUIDIC MEMS MARKET USED IN BIOCHIP PRODUCTION, THROUGH 2010 (MILLIONS)
• Table 88 GLOBAL FORECAST FOR MICROFLUIDIC MEMS MARKET USED IN FLAT PANEL DISPLAY PRODUCTION, THROUGH 2010 (MILLIONS)
• Table 89 GLOBAL FORECAST FOR DEVELOPMENTAL MICROFLUIDIC MEMS MARKET APPLICATIONS, THROUGH 2010 ($ BILLIONS)
• Table 90 GLOBAL FORECAST FOR MICROFLUIDIC MEMS MARKET USED IN PRINTABLE ORGANIC ELECTRONICS, THROUGH 2010 (MILLIONS)
• Table 91 GLOBAL FORECAST FOR MICROFLUIDIC MEMS MARKET USED IN CBW SENSORS, THROUGH 2010 (MILLIONS)
• Table 92 GLOBAL FORECAST FOR MICROFLUIDIC MEMS MARKET USED IN FOOD TESTING APPLICATIONS, THROUGH 2010 (MILLIONS)
• Table 93 GLOBAL FORECAST FOR RF MEMS MARKET, THROUGH 2010 ($ MILLIONS)
• Table 94 GLOBAL FORECAST OF SALES MOBILE PHONE HANDSETS, THROUGH 2010 (MILLIONS UNITS)
• Table 95 GLOBAL FORECAST FOR RF MEMS ACOUSTIC WAVE RESONATORS MARKET, THROUGH 2010 (MILLIONS)
• Table 96 GLOBAL FORECAST FOR EMERGING RF MEMS MARKET APPLICATIONS IN TELECOMMUNICATIONS, THROUGH 2010 ($ BILLIONS)
• Table 97 GLOBAL FORECAST FOR RF MEMS SWITCHES MARKET, THROUGH 2010 (MILLIONS)
• Table 98 GLOBAL FORECAST FOR RF MEMS INDUCTORS AND CAPACITORS MARKET, THROUGH 2010 ($ MILLIONS)
• Table 99 GLOBAL FORECAST FOR OTHER TYPES OF RF MEMS MARKETS, THROUGH 2010 (MILLIONS)
• Table 100 GLOBAL FORECAST FOR MEMS CHEMICAL AND GAS SENSOR MARKET, THROUGH 2010 ($ MILLIONS)
• Table 101 GLOBAL FORECAST FOR INDUSTRIAL CHEMICAL AND GAS SENSORS MARKET FOR OTHER TYPES OF MEMS, THROUGH 2010 (MILLIONS)
• Table 102 GLOBAL FORECAST FOR DEVELOPMENTAL MEMS CHEMICAL AND GAS SENSOR APPLICATIONS MARKET, THROUGH 2010 ($ MILLIONS)
• Table 103 GLOBAL FORECAST OF CATALYTIC CONVERTER-EQUIPPED VEHICLES PRODUCED, THROUGH 2010 (MILLION UNITS)
• Table 104 GLOBAL FORECAST FOR MEMS GAS SENSORS MARKET USED IN AUTOMOTIVE APPLICATIONS, THROUGH 2010 ($ MILLIONS)
• Table 105 GLOBAL FORECAST FOR SALES OF BLOOD GAS MONITORS, THROUGH 2010 (UNITS)
• Table 106 GLOBAL FORECAST FOR MEMS BLOOD GAS SENSORS MARKET, THROUGH 2010 (UNITS)
• Table 107 GLOBAL FORECAST FOR AIR POLLUTION MONITORING EQUIPMENT SALES, THROUGH 2010 ($ BILLIONS)
• Table 108 GLOBAL FORECAST FOR PORTABLE/PERSONAL AIR QUALITY MONITORS MARKET, THROUGH 2010 (MILLIONS)
• Table 109 GLOBAL FORECAST FOR MEMS USED IN PORTABLE CW AGENT DETECTORS, THROUGH 2010 (MILLIONS)
• Table 110 GLOBAL FORECAST FOR MEMS PRESSURE SENSOR MARKET, THROUGH 2010 ($ MILLIONS)
• Table 111 GLOBAL FORECAST FOR ESTABLISHED MEMS MARKET BY PRESSURE SENSOR APPLICATIONS, THROUGH 2010($ BILLIONS)
• Table 112 GLOBAL FORECAST FOR ESTABLISHED AUTOMOTIVE MEMS PRESSURE SENSOR MARKET, THROUGH 2010 ($ MILLIONS)
• Table 113 GLOBAL FORECAST FOR MEMS MANIFOLD ABSOLUTE PRESSURE SENSORS MARKET, THROUGH 2010 (MILLIONS)
• Table 114 GLOBAL FORECAST OF LIGHT VEHICLE PRODUCTION, THROUGH 2010 (MILLION VEHICLES)
• Table 115 GLOBAL FORECAST FOR MEMS TIRE PRESSURE SENSORS MARKET, THROUGH 2010 (MILLIONS)
• Table 116 GLOBAL FORECAST FOR MEMS BLOOD PRESSURE SENSORS MARKET, THROUGH 2010 (MILLIONS)
• Table 117 GLOBAL FORECAST FOR MEMS PRESSURE SENSORS MARKET IN HOME APPLIANCES, THROUGH 2010 (MILLIONS)
• LIST OF FIGURES
• Summary Figure:
• Figure 1 GLOBAL SHARE OF MEMS MATERIALS TECHNOLOGIES, 2004 AND 2010 (PERCENT OF TOTAL MEMS SHIPMENTS)
• Figure 2 GLOBAL SHARE OF MEMS FABRICATION TECHNOLOGIES, 2004 AND 2010 (PERCENT OF TOTAL MEMS SHIPMENTS)
• Figure 3 SACRIFICIAL LAYER ETCHING
• Figure 4 LIGA PROCESS DIAGRAM
• Figure 5 ISOTROPIC VS. ANISOTROPIC ETCHING
• Figure 6 MASKLESS OPTICAL LITHOGRAPHY SYSTEM
• Figure 7 SHARE OF U.S. MEMS-RELATED PATENTS AND PATENT APPLICANTS RELATING TO MEMS (%)
• Figure 8 TRENDS IN MEMS-RELATED U.S. PATENT ISSUED ANNUALLY, 2000-2005 (NUMBER OF PATENTS GRANTED EACH YEAR)
• Figure 9 TOTAL U.S. MEMS PATENT AND PATENT APPLICATION HOLDERS, BY COUNTRY, AS OF DECEMBER 2005 (%)
• Figure 10 GLOBAL FORECAST OF MEMS SALES TRENDS, 2004-2010 ($ BILLIONS)
• Figure 11 GLOBAL FORECAST OFP MEMS GROWTH RATE COMPARED WITH GROWTH OF SIMILAR TECHNOLOGIES (PROJECTED AAGR%, 2005-2010)
• Figure 12 GLOBAL SHARE OF THE MEMS MARKET BY TYPE, 2004 AND 2010 (%)
• Figure 13 GLOBAL SHARE OF THE MEMS MARKET BY APPLICATION, 2004 and 2010 (%)
• Figure 14 GLOBAL SHARE OF MEMS ACCLEROMETER SALES BY APPLICATION SEGMENT, 2004 AND 2010 (%)
• Figure 15 GLOBAL FORECAST OF AIRBAG MODULES SHIPMENTS. 2004-2010 (MILLION UNITS)
• Figure 16 GLOBAL FORECAST OF LIGHT VEHICLES WITH STABILITY CONTROL SYSTEM SALES, 2004-2010 (MILLION VEHICLES)
• Figure 17 GLOBAL FORECAST OF TOTAL SHIPMENTS FOR VEHICLE NAVIGATION SYSTEMS, 2004-2010 (MILLION SYSTEMS SHIPPED)
• Figure 18 GLOBAL FORECAST FOR SALES IN CARDIAC PACEMAKERS, 2004-2010 (THOUSAND UNITS)
• Figure 19 GLOBAL FORECAST OF MILITARY/AEROSPACE MARKET FOR GPS SYSTEMS, 2004-2010 ($ MILLIONS)
• Figure 20 GLOBAL FORECAST FOR SALES OF HARD DISK-EQUIPPED PORTABLE ELECTRONIC DEVICES, 2004-2010 (MILLION UNITS)
• Figure 21 GLOBAL FORECAST OF SALES OF MOBILE PHONE HANDSETS, 2004-2010 (MILLION UNITS)
• Figure 22 GLOBAL FORECAST FOR SALES OF ACCELEROMETER EQUIPPED VIDEO GAMING DEVICES, 2004-2005, AND 2010 (MILLION UNITS)
• Figure 23 GLOBAL FORECAST OF UNIT SALES OF DIGITAL CAMERAS, 2004-2010 (MILLION UNITS)
• Figure 24 GLOBAL FORECAST OF MEMS GYROSCOPE SALES BY APPLICATION, 2004 AND 2010 (%)
• Figure 25 GLOBAL FORECAST FOR SALES OF VEHICLES WITH ROLLOVER DETECTION SYSTEMS, 2004-2010 (MILLION UNITS)
• Figure 26 GLOBAL FORECAST OF SEGWAY SALES, 2004-2010 (MILLION UNITS)
• Figure 27 GLOBAL FORECAST FOR SHIPMENTS OF ROBOTIC TOYS, 2004-2010 ($ MILLIONS)
• Figure 28 GLOBAL FORECAST FOR SALES OF HOUSEHOLD FUNCTIONAL ROBOTS, 2004-2010 (MILLION UNITS)
• Figure 29 GLOBAL FORECAST FOR SHIPMENTS OF MOBILE INDUSTRIAL/SERVICE ROBOTS, 2004-2010 (UNITS)
• Figure 30 GLOBAL SHARE OF MOBILE INDUSTRIAL/SERVICE ROBOT MARKET, 2004
• Figure 31 GLOBAL SHARE OF OPTICAL MEMS SALES BY APPLICATION, 2004 AND 2010 (%)
• Figure 32 GLOBAL FORECAST OF OPTICAL SWITCH MARKET, 2004-2010 ($ MILLIONS)
• Figure 33 GLOBAL FORECAST FOR SALES OF DLP TV SETS, 20042010 (MILLION UNITS)
• Figure 34 SHARE OF GLOBAL MICROFLUIDIC MEMS SALES BY APPLICATION, 2004 AND 2010 (%)
• Figure 35 GLOBAL FORECAST FOR SHIPMENTS OF INKJET DEVICES, 2004-2010 (MILLION UNITS)
• Figure 36 GLOBAL FORECAST OF TRENDS IN SHIPMENTS OF BIOCHIPS, 2004-2010 ($ BILLIONS)
• Figure 37 SHARE OF GLOBAL PRINTED ORGANIC ELECTRONICS MARKET SEGMENTS, 2010 (%)
• Figure 38 GLOBAL FORECAST OF SALES MOBILE PHONE HANDSETS, 2004-2010 (MILLIONS UNITS)
• Figure 39 GLOBAL FORECAST FOR MEMS CHEMCIAL AND GAS SENSORS MARKETS, 2010 (%)
• Figure 40 GLOBAL FORECAST OF VEHICLES EQUIPPED WITH CATALYTIC CONVERTERS, 2004-2010 (MILLION UNITS)
• Figure 41 GLOBAL FORECAST FOR SALES OF BLOOD GAS MONITORS (UNITS)
• Figure 42 GLOBAL FORECAST OF MONITORING AND SENSING EQUIPMENT FOR AIR POLLUTION MARKET, 2004-2010 ($ BILLIONS)
• Figure 43 SHARE OF GLOBAL MEMS PRESSURE SENSOR SALES BY APPLICATION, 2004 AND 2010 (%)
• Figure 44 GLOBAL FORECAST OF LIGHT VEHICLE PRODUCTION, 2004-2010 (MILLION VEHICLES)
• Figure 45 ESTIMATED MEMS INDUSTRY CONCENTRATION, 2004 (PERCENT OF TOTAL MEMS SHIPMENT)
• Figure 46 MEMS COMPANIES BY NATIONALITY, 2004 (PERCENT OF ALL MEMS COMPANIES WORLDWIDE)
• Figure 47 OVERALL MEMS MARKET SHARES, 2004 (PERCENT OF TOTAL MEMS SHIPMENTS)
• Figure 48 MEMS ACCELEROMETER MARKET SHARES, 2004 (%)
• Figure 49 MICROFLUIDIC MEMS MARKET SHARES, 2004 (%)
• Figure 50 OPTICAL MEMS MARKET SHARES, 2004 (%)