半導体・マイクロエレクトロニクスの洗浄市場

Abstract

REPORT HIGHLIGHTS

• The global market for microelectronics cleaning equipment, consumables and services was worth about $3.8 billion in 2005. This figure is projected to reach $4.2 billion by 2006 and $6.9 billion by 2011, at an AAGR of 10.4% between 2006 and 2011.
• The chemicals, gases and other consumables market is estimated at $3.0 billion in 2011, with average annual growth estimated at 9.8%.
• Wet process cleaning technologies accounted for about 91% of the total microelectronics cleaning market in 2005, a percentage that is expected to decline slightly to 89% in 2011. Emerging cleaning technologies (including supercritical carbon dioxide and other technologies) are expected to increase their market share from 0.1% in 2005 to nearly 3% in 2011, while dry cleaning technologies' share decreases from 9% to 8%.

Table of Contents

INTRODUCTION

• STUDY BACKGROUND
• STUDY GOALS AND OBJECTIVES
• INTENDED AUDIENCE
• SCOPE AND FORMAT
• METHODOLOGY AND INFORMATION SOURCES
• ANALYST CREDENTIALS
• RELATED BCC RESEARCH REPORTS
• BCC ONLINE SERVICES
• DISCLAIMER

EXECUTIVE SUMMARY

• Summary Table:
  • GLOBAL FORECAST OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLY AND SERVICE SALES, THROUGH 2011 ($ BILLIONS)
• Summary Figure:
  • GLOBAL FORECAST OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLY AND SERVICE SALES, 2005-2011 ($ BILLIONS)

CLEANING PROCESS OVERVIEW

• GENERAL DESCRIPTION
  • DEFINITIONS
    • Cleaning
    • Stripping
    • Ashing
    • Etching
    • Front End-of-Line (FEOL)
    • Back End-of-Line (BEOL)
  • HISTORICAL NOTE
• IMPORTANCE OF CLEANING TO THE ELECTRONICS INDUSTRY
  • GENERAL IMPORTANCE OF CLEANING
    • Device Processing Yield
    • Device Performance
    • Device Reliability
  • CONTAMINATION TYPES
    • Particles
    • Inorganic Chemicals
    • Organic Chemicals
    • Dissolved Organics and Bacteria
  • CONTAMINATION SOURCES
• SPECIFIC APPLICATIONS
  • INTEGRATED CIRCUITS
  • PHOTOMASKS
  • PRINTED CIRCUIT BOARDS
  • PCB CLEANING APPLICATIONS
    • Removal of Flux Residues from PCB Assemblies after Soldering
    • Removal of Solder Paste or Adhesive from Stencils or Misprints
  • HARD DISK DRIVES
    • Read-write Heads
    • Storage Media
  • MICROELECTROMECHANICAL SYSTEMS (MEMS)
  • FLAT PANEL DISPLAYS
  • IMAGE SENSORS
• DEVELOPMENTS THAT MAY INFLUENCE MARKETS FOR CLEANING TECHNOLOGIES
  • SHRINKING FEATURE SIZES
  • NEW MATERIALS
    • High-k Dielectrics
    • New Salicides
    • Copper
  • PROCESS-RELATED DEVELOPMENTS
    • Trends toward Single-wafer Processing
    • Multiple-use Tools
    • ITRS
    • Table 1 CLEANING PARAMETERS INFLUENCING DEVICE YIELDS
      • Itrs (Continued)

CLEANING TECHNOLOGIES, EQUIPMENT, CHEMICALS AND SERVICES

• SUMMARY
• TECHNOLOGIES, EQUIPMENT, AND CHEMICALS
  • WET PROCESS CLEANING
    • Technologies
      • Wet Cleaning Systems
        • Batch Immersion Cleaning Systems
        • Batch Spray Cleaning Systems
        • Single-wafer Immersion Systems
        • Single-wafer Spray Systems
      • Cleaning Chemistries
        • RCA Cleaning Chemistry
        • Piranha
        • Dilute Chemistries
        • Aqueous and Semiaqueous Chemistries
        • Single-wafer Cleaning Chemistries
        • Dilute Sulfuric Peroxide, Plus (DSP+)
        • Applied Materials AM1
        • Dilute HF with Ozonated Water (SCROD)
        • Direct Application of Gaseous Ozone
        • Aqueous Foam
      • Ultrapure Water
        • Reverse Osmosis Systems
        • Deionization
        • Ion Exchange Systems
        • Electrodialysis/Electrodialysis Reversal (ED/EDR) Systems
        • Filtration
    • Applications
      • Semiconductor Manufacturing
        • Current Applications
        • Emerging Applications
        • Other Applications
        • Photomasks
        • Printed Circuit Boards (PCBs)
        • Hard Disk Drive Media and Read/write Heads
        • Flat Panel Displays
    • Advantages and Disadvantages
      • Overall Advantages and Disadvantages of Wet Cleaning
        • Advantages and Disadvantages of Specific Wet Cleaning Technologies
        • Batch Immersion Systems
        • Batch Spray Systems
        • Single-wafer Immersion Systems
        • Single-Wafer Spray Systems
    • Products and Manufacturers
      • Wet Cleaning Equipment
      • Table 2 WET CLEANING EQUIPMENT MANUFACTURERS
      • Figure 1 GLOBAL WET CLEANING EQUIPMENT MARKET SHARES, 2005 (%)
      • Wet-cleaning Chemicals
      • Table 3 WET CLEANING CHEMICAL MANUFACTURERS
      • Figure 2 GLOBAL WET CLEANING CHEMICAL MARKET SHARES, 2005 (%)
      • Water Purification Systems
      • Table 4 WATER PURIFICATION EQUIPMENT MANUFACTURERS
      • Figure 3 GLOBAL ULTRAPURE WATER MARKET SHARES, 2005 (%)
    • Patent Analysis
      • Figure 4 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO WET CLEANING TECHNOLOGIES (%)
      • Wet Cleaning Equipment
      • Figure 5 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO WET CLEANING EQUIPMENT BY TYPE OF EQUIPMENT* (%)
      • Table 5 WET CLEANING EQUIPMENT IP PORTFOLIOS (NUMBER OF U.S. WET CLEANING EQUIPMENT PATENTS AND PATENT APPLICATIONS)
      • Wet Cleaning Chemicals
      • Figure 6 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO WET CLEANING EQUIPMENT BY TYPE* (%)
      • Ultrapure Water
      • Figure 7 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO ULTRAPURE WATER BY PRODUCTION TECHNOLOGY TYPE* (%)
  • DRY PROCESS CLEANING
    • Technologies
      • Dry Cleaning Systems
        • Plasma Cleaning
        • Figure 8 TYPICAL (CAPACITIVE) RF PLASMA SYSTEM
        • Cryogenic Aerosol Cleaning
        • Laser Resist Stripping
        • Ultraviolet/Ozone Cleaning
      • Dry Cleaning Gases
      • Table 6 DRY CLEANING GASES
    • Applications
    • Advantages and Disadvantages
    • Products and Manufacturers
      • Equipment
      • Table 7 DRY CLEANING EQUIPMENT MANUFACTURERS
      • Figure 9 GLOBAL DRY CLEANING EQUIPMENT MARKET SHARES, 2005 (%)
      • Consumables
      • Table 8 DRY CLEANING GAS MANUFACTURERS
      • Figure 10 GLOBAL DRY CLEANING GAS MARKET SHARES, 2005 (%)
      • Figure 10 (CONTINUED)
    • Patent Analysis
    • Figure 11 U.S. PATENTS ISSUED SINCE 1976 AND PATENT APPLICATIONS PENDING THAT RELATE TO DRY PROCESS CLEANING (%)
  • EMERGING ELECTRONICS CLEANING TECHNOLOGIES
    • Supercritical CO2 Process
      • Technology
      • Applications
      • Advantages and Disadvantages
      • Manufacturers
      • Table 9 SUPERCRITICAL CO2 CLEANING EQUIPMENT MANUFACTURERS
      • Patent Analysis
      • Figure 12 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO SCCO2 CLEANING (%)
      • Figure 12 (CONTINUED)
    • Anhydrous SO3 Cleaning
      • Technology
      • Applications
      • Advantages and Disadvantages
      • Developers and Manufacturers
      • Patent Analysis
      • Figure 13 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO SO3 CLEANING (%)
    • Laser-induced Shockwave Cleaning (LSC)
      • Technology
      • Applications
      • Advantages and Disadvantages
      • Manufacturers
      • Patent Analysis
    • Other Technologies
      • Nanoprobe Cleaning
      • Vapor Cleaning
• CONTAMINATION DETECTION TECHNOLOGIES
  • TECHNOLOGY
    • Table 10 CONTAMINANT DETECTION AND CHARACTERIZATION TECHNOLOGIES
    • Laser Backscattering
    • Optical Microscopy
    • Other Technologies
  • ADVANTAGES AND DISADVANTAGES
  • Table 11 CONTAMINANT DETECTION AND CHARACTERIZATION TECHNOLOGIES ADVANTAGES AND DISADVANTAGES
  • MANUFACTURERS
  • Table 12 CONTAMINANT DETECTION SYSTEM MANUFACTURERS
  • Table 12 (CONTINUED)
  • Figure 14 CONTAMINANT DETECTION SYSTEM MARKET LEADERS, 2005 (% OF TOTAL SALES)
  • Figure 14 (CONTINUED)
  • PATENT ANALYSIS
  • Figure 15 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO CONTAMINATION DETECTION SYSTEMS, BY TECHNOLOGY (%)
  • Figure 16 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO CONTAMINATION DETECTION SYSTEMS, BY ASSIGNEE (%)
• CLEANING-RELATED CONTRACT SERVICES
  • Table 13 COMPANIES PROVIDING OUTSOURCED MICROELECTRONICS CLEANING SERVICES

GLOBAL MARKET FOR ELECTRONICS CLEANING EQUIPMENT, SUPPLIES AND SERVICES, 2005-2011

• SUMMARY
  • OVERALL MARKET
  • Table 14 GLOBAL FORECAST OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLY AND SERVICE SALES, THROUGH 2011 ($ BILLIONS)
  • Figure 17 MICROELECTRONIC CLEANING EQUIPMENT AND SUPPLIES MARKET TRENDS, 2005-2011 ($ BILLIONS)
  • Figure 18 SALES OF MICROELECTRONICS CLEANING EQUIPMENT VS. SUPPLIES MARKET BY PROCESS TYPE, 2005 AND 2011 (% OF GLOBAL ELECTRONICS CLEANING SALES) (%)
  • MARKET BY TECHNOLOGY TYPE
  • Figure 19 MICROELECTRONICS CLEANING MARKET BY PROCESS TYPE, 2005 AND 2011* (% OF GLOBAL ELECTRONICS CLEANING SALES)
  • MARKET BY APPLICATION TYPE
  • Figure 20 MICROELECTRONICS CLEANING MARKET BY APPLICATION TYPE, 2005 AND 2011 (% OF GLOBAL ELECTRONICS CLEANING SALES)
  • MARKETS BY REGION
  • Figure 21 MICROELECTRONICS CLEANING MARKET SHARES BY REGION, 2005 AND 2011 (%)
• DETAILED ESTIMATES AND PROJECTIONS
  • WET PROCESS MARKET
    • 2005 Sales
      • Figure 22 GLOBAL SALES OF WET CLEANING EQUIPMENT, CHEMICALS AND ULTRAPURE WATER, 2005 (%)
      • Equipment
      • Figure 23 WET CLEANING EQUIPMENT SALES BY TYPE, 2005 (%)
      • Chemicals
      • Figure 24 CONSUMPTION OF WET CLEANING CHEMICALS BY TYPE, 2005 (%)
      • Ultrapure Water
    • Market Drivers
      • Trends in Global Semiconductor Sales
      • Table 15 GLOBAL FORECAST OF SEMICONDUCTOR SALES, THROUGH 2011 ($ BILLIONS)
      • Figure 25 TRENDS IN GLOBAL SEMICONDUCTOR SALES, 2005-2011 ($ BILLIONS)
      • Growing Complexity of Semiconductors
      • Figure 26 TRENDS IN FEOL VS. BEOL CLEANING STEPS, 2005 AND 2011 (%)
      • Growing Use of 300 mm Wafers
      • Table 16 SALES OF 300 MM WAFER TOOLS, THROUGH 2005 ($ BILLIONS)
      • Figure 27 TRENDS IN SEMICONDUCTOR INDUSTRY INVESTMENT IN 300 MM-CAPABLE PROCESS EQUIPMENT, 2001-2005 ($ BILLIONS/PERCENT)
      • Table 17 GLOBAL FORECAST OF SINGLE-WAFER CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS/PERCENT)
      • Figure 28 SALES TRENDS IN SINGLE-WAFER CLEANING EQUIPMENT, 2005-2011 ($ BILLIONS/PERCENT)
      • New Interconnect Materials
      • Table 18 GLOBAL FORECAST OF LOW-K DIELECTRIC MATERIALS SALES USED IN SEMICONDUCTOR PRODUCTION, THROUGH 2011 ($ MILLIONS)
      • Figure 29 SALES TRENDS FOR LOW-K DIELECTRIC MATERIALS USED IN SEMICONDUCTOR PRODUCTION, 2005-2011 ($ MILLIONS)
      • Diversification of Wet Cleaning Chemistry Suppliers
      • Growing Importance of Nonsemiconductor Applications
      • Figure 30 GLOBAL SHARE OF SEMICONDUCTOR VS. NONSEMICONDUCTOR APPLICATIONS FOR WET CLEANING EQUIPMENT, 2005 AND 2011 (%)
    • Projected Market: 2005 to 2010
      • Summary
      • Table 19 GLOBAL FORECAST OF WET PROCESS CLEANING EQUIPMENT AND CHEMICAL SALES, THROUGH 2011 ($ BILLIONS)
      • Equipment
      • Table 20 GLOBAL FORECAST OF WET PROCESS CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS)
      • Figure 31 TRENDS IN WET CLEAN EQUIPMENT MARKET SHARES, 2005 AND 2011 (%)
      • Chemicals
      • Table 21 GLOBAL FORECAST OF WET PROCESS CLEANING CHEMISTRIES SALES, THROUGH 2011 ($ BILLIONS)
      • Figure 32 GLOBAL SHARE OF THE WET CLEAN CHEMISTRY MARKET, 2005 AND 2011 (%)
      • Ultrapure Water
      • Table 22 GLOBAL FORECAST OF ULTRAPURE WATER SALES, THROUGH 2011 ($ BILLIONS)
  • DRY PROCESS MARKET
    • 2005 Sales
      • Figure 33 GLOBAL SALES OF DRY CLEANING EQUIPMENT AND CHEMICALS, 2005 (%)
      • Figure 33 (CONTINUED)
      • Equipment
      • Figure 34 GLOBAL SHARE OF DRY CLEANING EQUIPMENT SALES BY TYPE, 2005 ($ BILLIONS)
      • Gases
      • Figure 35 GLOBAL SHARE OF DRY CLEANING GASES CONSUMPTION BY TYPE, 2005 (%)
      • Figure 35 (CONTINUED)
    • Market Drivers
      • Overall Resist Consumption
      • Table 23 GLOBAL FORECAST OF RESIST MATERIAL SALES, THROUGH 2011 ($ BILLIONS)
      • Figure 36 GLOBAL FORECAST IN MARKETS FOR RESIST MATERIALS, 2005-2011 ($ BILLIONS)
      • Use of New Resist and Semiconductor Materials
        • New Types of Photoresist
        • New Interconnect Materials
      • Overall Ozone Generation System Sales
      • Table 24 OZONE TECHNOLOGY SALES, THROUGH 2011 ($ MILLIONS)
      • Figure 37 GLOBAL FORECAST OF OZONE TECHNOLOGY MARKETS, 2005-2011 ($ MILLIONS)
    • Projected Market: 2006-2011
      • Summary
      • Table 25 GLOBAL FORECAST OF DRY PROCESS CLEANING EQUIPMENT AND GASES SALES, THROUGH 2011 ($ BILLIONS)
      • Equipment
      • Table 26 GLOBAL FORECAST OF DRY PROCESS CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS)
      • Figure 38 GLOBAL SHARE OF DRY STRIP TECHNOLOGY MARKET, 2005 AND 2011
      • Gases
      • Table 27 GLOBAL FORECAST OF DRY PROCESS CLEANING GAS SALES BY TYPE, THROUGH 2011 ($ BILLIONS)
      • Figure 39 GLOBAL SHARE OF DRY STRIP TECHNOLOGY MARKETS BY TYPE, 2005 AND 2011 (%)
  • EMERGING CLEANING TECHNOLOGY MARKETS
    • Supercritical Carbon Dioxide (SCCO2)
      • Sales
      • Market Drivers
      • Trends toward Advanced and Next-Generation Lithography (NGL) Technologies
      • Figure 40 GLOBAL FORECAST OF SALES TRENDS FOR NGL VS. OTHER PHOTRESIST TYPES, 2005-2011 ($ BILLIONS)
    • Projected Market: 2005 to 2010
      • Equipment
      • Table 28 SCCO2 CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS)
      • Carbon Dioxide
      • Table 29 CARBON DIOXIDE CONSUMPTION BY SCCO2 CLEANING TOOLS, THROUGH 2011 ($ BILLIONS)
    • Other Emerging Cleaning Technologies
  • CLEANING-RELATED SERVICES MARKETS
    • 2005 Sales
    • Figure 41 GLOBAL SHARE OF CLEANING-RELATED SERVICES MARKET, 2005 ($ BILLIONS)
    • Market Drivers
      • Semiconductor Industry Purchases of Outside Services
    • Figure 42 RECENT TRENDS IN U.S. SEMICONDUCTOR INDUSTRY PURCHASES OF SELECTED CONTRACT SERVICES, 1997 AND 2002 ($ BILLIONS/% OF TOTAL SHIPMENT VALUE)
    • Projected Market, 2006 to 2011
    • Table 30 GLOBAL FORECAST OF CLEANING-RELATED CONTRACT SERVICE SALES, THROUGH 2011 ($ BILLIONS)
  • CONTAMINANT DETECTION SYSTEM MARKETS
    • 2005 Sales
    • Figure 43 MICRODEVICE INSPECTION SYSTEM SALES, 2005 (%)
    • Market Drivers
    • Projected Market: 2006 to 2011
    • Table 31 GLOBAL FORECAST OF SEMICONDUCTOR INSPECTION SYSTEM SALES, THROUGH 2011 ($ BILLIONS)
• OTHER FACTORS THAT COULD INFLUENCE THE CLEANING EQUIPMENT AND SUPPLIES MARKET
  • ENVIRONMENTAL, HEALTH AND SAFETY ISSUES
    • United States
    • EU
    • Japan
    • Japan (Continued)

INDUSTRY STRUCTURE

• NUMBERS AND SIZES OF FIRMS
• Figure 44 MICROELECTONICS CLEANING EQUIPMENT MANUFACTURERS ACCORDING TO ANNUAL SALES LEVELS, 2005 (%)
• CLEANING PRODUCT SPECIALIZATION
• Table 32 MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURER SALES OF CLEANING EQUIPMENT VS. TOTAL SALES, 2005 ($ BILLIONS)
• Figure 45 MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURER SPECIALIZATION RATIOS, 2005 (CLEANING EQUIPMENT SALES AS A % OF TOTAL SALES)
• NATIONALITY
• Figure 46 NATIONALITIES OF MICROELECTONICS CLEANING EQUIPMENT MANUFACTURERS, 2005 (%)
• OWNERSHIP TRENDS
  • OWNERSHIP TRENDS (CONTINUED)

VENDOR PROFILES

• AIR PRODUCTS AND CHEMICALS, INC.
• AKRION, INC.
• ANON, INC.
• APPLIED MATERIALS, INC.
• ARCH CHEMICALS, INC.
• ATMI, INC.
• AUSTIN AMERICAN TECHNOLOGY
• AXCELIS TECHNOLOGIES, INC.
• AXIC, INC.
• AZ ELECTRONIC MATERIALS
• THE BOC GROUP PLC
• THE BWT GROUP
• CANON USA, INC.
• CYANTEC, INC.
• DAINIPPON SCREEN MANUFACTURING CO., LTD.
• DONGJIM SEMICHEM
• DONGWOO FINE CHEMCIALS CO., LTD.
• DUPONT ELECTRONIC TECHNOLOGIES
• EKC TECHNOLOGIES
• EV GROUP
• FMC INDUSTRIAL CHEMICALS
• FSI INTERNATIONAL, INC.
• GENERAL CHEMICAL CORP.
• GLEGG INDUSTRIES, INC.
• HITACHI, LTD.
• HONEYWELL ELECTRONIC MATERIALS
• IONICS, INC.
• JEOL, LTD.
• KANTO CORP.
• KLA-TENCOR CORP.
• L'AIR LIQUIDE SA
• LAM RESEARCH CORP.
• LEICA MICROSYSTEMS AG
• LOTUS SYSTEMS GMBH
• MACDERMID, INC.
• MALLINCKRODT BAKER, INC.
• MATHESON TRI-GAS, INC.
• MATTSON TECHNOLOGY, INC
• MERCK KGA
• MICELL INTEGRATED SYSTEMS, INC.
• MITSUBISHI CHEMICAL CORP.
• MKS INSTRUMENTS, INC.
• NANOMETRICS, INC.
• NEXX SYSTEMS, INC.
• NIKON CORP.
• NIPPON SANSO KK
• NOVASCAN TECHNOLOGIES, INC.
• NOVELLUS SYSTEMS, INC.
• OSRAM SYLVANIA, INC.
• PENTAGON TECHNOLOGIES, INC.
• PRAXAIR, INC.
• QUANTUMCLEAN, INC.
• RD CHEMICAL
• ROHM AND HAAS
• SC FLUIDS, INC.
• SCP GLOBAL TECHNOLOGIES, INC.
• SEZ HOLDING, LTD.
• SHIBAURA MECHATRONICS CORP.
• SOLVAY S.A.
• STOELTING
• SUMITOMO CHEMICAL CO., LTD.
• SUPERCRITICAL SYSTEMS, INC.
• SUSS MICROTEC AG
• TAIYO NIPPON SANSO KK
• TEPLA AG
• TOKYO ELECTRON, LTD.
• TOKYO OHKA KOGYO CO., LTD.
• U.S. FILTER CORP.
• WAKO PURE CHEMICAL INDUSTRIES, LTD.
• ZESTRON CORP.

LIST OF TABLES

• Summary Table:
  • GLOBAL FORECAST OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLY AND SERVICE SALES, THROUGH 2011 ($ BILLIONS)
• Table 1 CLEANING PARAMETERS INFLUENCING DEVICE YIELDS
• Table 2 WET CLEANING EQUIPMENT MANUFACTURERS
• Table 3 WET CLEANING CHEMICAL MANUFACTURERS
• Table 4 WATER PURIFICATION EQUIPMENT MANUFACTURERS
• Table 5 WET CLEANING EQUIPMENT IP PORTFOLIOS (NUMBER OF U.S. WET CLEANING EQUIPMENT PATENTS AND PATENT APPLICATIONS)
• Table 6 DRY CLEANING GASES
• Table 7 DRY CLEANING EQUIPMENT MANUFACTURERS
• Table 8 DRY CLEANING GAS MANUFACTURERS
• Table 9 SUPERCRITICAL CO2 CLEANING EQUIPMENT MANUFACTURERS
• Table 10 CONTAMINANT DETECTION AND CHARACTERIZATION TECHNOLOGIES
• Table 11 CONTAMINANT DETECTION AND CHARACTERIZATION TECHNOLOGIES ADVANTAGES AND DISADVANTAGES
• Table 12 CONTAMINANT DETECTION SYSTEM MANUFACTURERS
• Table 13 COMPANIES PROVIDING OUTSOURCED MICROELECTRONICS CLEANING SERVICES
• Table 14 GLOBAL FORECAST OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLY AND SERVICE SALES, THROUGH 2011 ($ BILLIONS)
• Table 15 GLOBAL FORECAST OF SEMICONDUCTOR SALES, THROUGH 2011 ($ BILLIONS)
• Table 16 SALES OF 300 MM WAFER TOOLS, THROUGH 2005 ($ BILLIONS)
• Table 17 GLOBAL FORECAST OF SINGLE-WAFER CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS/PERCENT)
• Table 18 GLOBAL FORECAST OF LOW-K DIELECTRIC MATERIALS SALES USED IN SEMICONDUCTOR PRODUCTION, THROUGH 2011 ($ MILLIONS)
• Table 19 GLOBAL FORECAST OF WET PROCESS CLEANING EQUIPMENT AND CHEMICAL SALES, THROUGH 2011 ($ BILLIONS)
• Table 20 GLOBAL FORECAST OF WET PROCESS CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS)
• Table 21 GLOBAL FORECAST OF WET PROCESS CLEANING CHEMISTRIES SALES, THROUGH 2011 ($ BILLIONS)
• Table 22 GLOBAL FORECAST OF ULTRAPURE WATER SALES, THROUGH 2011 ($ BILLIONS)
• Table 23 GLOBAL FORECAST OF RESIST MATERIAL SALES, THROUGH 2011 ($ BILLIONS)
• Table 24 OZONE TECHNOLOGY SALES, THROUGH 2011 ($ MILLIONS)
• Table 25 GLOBAL FORECAST OF DRY PROCESS CLEANING EQUIPMENT AND GASES SALES, THROUGH 2011 ($ BILLIONS)
• Table 26 GLOBAL FORECAST OF DRY PROCESS CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS)
• Table 27 GLOBAL FORECAST OF DRY PROCESS CLEANING GAS SALES BY TYPE, THROUGH 2011 ($ BILLIONS)
• Table 28 SCCO2 CLEANING TOOL SALES, THROUGH 2011 ($ BILLIONS)
• Table 29 CARBON DIOXIDE CONSUMPTION BY SCCO2 CLEANING TOOLS, THROUGH 2011 ($ BILLIONS)
• Table 30 GLOBAL FORECAST OF CLEANING-RELATED CONTRACT SERVICE SALES, THROUGH 2011 ($ BILLIONS)
• Table 31 GLOBAL FORECAST OF SEMICONDUCTOR INSPECTION SYSTEM SALES, THROUGH 2011 ($ BILLIONS)
• Table 32 MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURER SALES OF CLEANING EQUIPMENT VS. TOTAL SALES, 2005 ($ BILLIONS)

LIST OF FIGURES

• Summary Figure:
  • GLOBAL FORECAST OF MICROELECTRONIC CLEANING EQUIPMENT, SUPPLY AND SERVICE SALES, 2005-2011 ($ BILLIONS)
• Figure 1 GLOBAL WET CLEANING EQUIPMENT MARKET SHARES, 2005 (%)
• Figure 2 GLOBAL WET CLEANING CHEMICAL MARKET SHARES, 2005 (%)
• Figure 3 GLOBAL ULTRAPURE WATER MARKET SHARES, 2005 (%)
• Figure 4 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO WET CLEANING TECHNOLOGIES (%)
• Figure 5 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO WET CLEANING EQUIPMENT BY TYPE OF EQUIPMENT* (%)
• Figure 6 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO WET CLEANING EQUIPMENT BY TYPE* (%)
• Figure 7 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO ULTRAPURE WATER BY PRODUCTION TECHNOLOGY TYPE* (%)
• Figure 8 TYPICAL (CAPACITIVE) RF PLASMA SYSTEM
• Figure 9 GLOBAL DRY CLEANING EQUIPMENT MARKET SHARES, 2005 (%)
• Figure 10 GLOBAL DRY CLEANING GAS MARKET SHARES, 2005 (%)
• Figure 11 U.S. PATENTS ISSUED SINCE 1976 AND PATENT APPLICATIONS PENDING THAT RELATE TO DRY PROCESS CLEANING (%)
• Figure 12 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO SCCO2 CLEANING (%)
• Figure 13 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO SO3 CLEANING (%)
• Figure 14 CONTAMINANT DETECTION SYSTEM MARKET LEADERS, 2005 (% OF TOTAL SALES)
• Figure 15 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO CONTAMINATION DETECTION SYSTEMS, BY TECHNOLOGY (%)
• Figure 16 U.S. PATENTS ISSUED SINCE 1976 AND PENDING PATENT APPLICATIONS RELATING TO CONTAMINATION DETECTION SYSTEMS, BY ASSIGNEE (%)
• Figure 17 MICROELECTRONIC CLEANING EQUIPMENT AND SUPPLIES MARKET TRENDS, 2005-2011 ($ BILLIONS)
• Figure 18 SALES OF MICROELECTRONICS CLEANING EQUIPMENT VS. SUPPLIES MARKET BY PROCESS TYPE, 2005 AND 2011 (% OF GLOBAL ELECTRONICS CLEANING SALES) (%)
• Figure 19 MICROELECTRONICS CLEANING MARKET BY PROCESS TYPE, 2005 and 2011 (% OF GLOBAL ELECTRONICS AND CLEANING SALES)
• Figure 20 MICROELECTRONICS CLEANING MARKET BY APPLICATION TYPE, 2005 AND 2011 (% OF GLOBAL ELECTRONICS CLEANING SALES)
• Figure 21 MICROELECTRONICS CLEANING MARKET SHARES BY REGION, 2005 AND 2011 (%)
• Figure 22 GLOBAL SALES OF WET CLEANING EQUIPMENT, CHEMICALS AND ULTRAPURE WATER, 2005 (%)
• Figure 23 WET CLEANING EQUIPMENT SALES BY TYPE, 2005 (%)
• Figure 24 CONSUMPTION OF WET CLEANING CHEMICALS BY TYPE, 2005 (%)
• Figure 25 TRENDS IN GLOBAL SEMICONDUCTOR SALES, 2005-2011 ($ BILLIONS)
• Figure 26 TRENDS IN FEOL VS. BEOL CLEANING STEPS, 2005 AND 2011 (%)
• Figure 27 TRENDS IN SEMICONDUCTOR INDUSTRY INVESTMENT IN 300 MM-CAPABLE PROCESS EQUIPMENT, 2001-2005 ($ BILLIONS/PERCENT)
• Figure 28 SALES TRENDS IN SINGLE-WAFER CLEANING EQUIPMENT, 2005-2011 ($ BILLIONS/PERCENT)
• Figure 29 SALES TRENDS FOR LOW-K DIELECTRIC MATERIALS USED IN SEMICONDUCTOR PRODUCTION, 2005-2011 ($ MILLIONS)
• Figure 30 GLOBAL SHARE OF SEMICONDUCTOR VS. NONSEMICONDUCTOR APPLICATIONS FOR WET CLEANING EQUIPMENT, 2005 AND 2011 (%)
• Figure 31 TRENDS IN WET CLEAN EQUIPMENT MARKET SHARES, 2005 AND 2011 (%)
• Figure 32 GLOBAL SHARE OF THE WET CLEAN CHEMISTRY MARKET, 2005 AND 2011 (%)
• Figure 33 GLOBAL SALES OF DRY CLEANING EQUIPMENT AND CHEMICALS, 2005 (%)
• Figure 34 GLOBAL SHARE OF DRY CLEANING EQUIPMENT SALES BY TYPE, 2005 ($ BILLIONS)
• Figure 35 GLOBAL SHARE OF DRY CLEANING GASES CONSUMPTION BY TYPE, 2005 (%)
• Figure 36 GLOBAL FORECAST IN MARKETS FOR RESIST MATERIALS, 2005-2011 ($ BILLIONS)
• Figure 37 GLOBAL FORECAST OF OZONE TECHNOLOGY MARKETS, 2005-2011 ($ MILLIONS)
• Figure 38 GLOBAL SHARE OF DRY STRIP TECHNOLOGY MARKET, 2005 AND 2011
• Figure 39 GLOBAL SHARE OF DRY STRIP TECHNOLOGY MARKETS BY TYPE, 2005 AND 2011 (%)
• Figure 40 GLOBAL FORECAST OF SALES TRENDS FOR NGL VS. OTHER PHOTRESIST TYPES, 2005-2011 ($ BILLIONS)
• Figure 41 GLOBAL SHARE OF CLEANING-RELATED SERVICES MARKET, 2005 ($ BILLIONS)
• Figure 42 RECENT TRENDS IN U.S. SEMICONDUCTOR INDUSTRY PURCHASES OF SELECTED CONTRACT SERVICES, 1997 AND 2002 ($ BILLIONS/% OF TOTAL SHIPMENT VALUE)
• Figure 43 MICRODEVICE INSPECTION SYSTEM SALES, 2005 (%)
• Figure 44 MICROELECTONICS CLEANING EQUIPMENT MANUFACTURERS ACCORDING TO ANNUAL SALES LEVELS, 2005 (%)
• Figure 45 MICROELECTRONICS CLEANING EQUIPMENT MANUFACTURER SPECIALIZATION RATIOS, 2005 (CLEANING EQUIPMENT SALES AS A % OF TOTAL SALES)
• Figure 46 NATIONALITIES OF MICROELECTONICS CLEANING EQUIPMENT MANUFACTURERS, 2005 (%)