産業オートメーション分野におけるMEMSセンサーおよびアクチュエーター：影響分析

Abstract

This study discusses the technology development activities associated with MEMS technology and its commercialization/market potential in the Industrial Automation arena.

Table of Contents

1 EXECUTIVE SUMMARY

• Scope & Methodology
  • Overview
  • Scope of the Research Service
  • Methodology
• Key Research Findings
  • Technology Snapshot
  • Key Technologies and Innovations
  • Analyst Insights

2 MICROMANUFACTURING

• Technology Snapshot
  • Overview of Micromanufacturing
  • Importance of Micromanufacturing
• Bulk Micromanufacturing
  • Overview of Etching
  • Isotropic and Anistropic Etching
  • Dry and Wet Etching
• Surface Micromachining
  • General Description
  • Surface Micromachining Process
• The LIGA Process
  • General Description
  • Electroplating
  • The SLIGA Process

3 MEMS TECHNOLOGY AND APPLICATIONS OVERVIEW

• MEMS Senors
  • Technology Viewpoint
  • Pressure Sensors
  • Accelerometers
  • Gyroscopes
  • Gas Sensors
  • Proximity/Position Sensors
  • Flow Sensors
  • Humidity; Temperature/Thermal Sensors
  • Mechanical Stress Sensors
  • Acoustic Wave Sensors
• MEMS Actuators
  • Technology Viewpoint
  • Micromotors
  • Micropumps
  • Microvalves
  • Microturbines
  • Micromirrors
  • MEMS Actuator Types and Lab-on-a-Chip Systems

4 TECHNOLOGY IMPACT AND ADOPTION FACTOR ANALYSIS

• Technology Impact Analysis
  • MEMS versus Conventional Technology
  • Technology Roadmap
  • Technology Features; Benefits; and Trends
• Technology Adoption Factor Analysis
  • Analysis of Technology Drivers
  • Analysis of Technology Restraints

5 GLOBAL TECHNOLOGY DEVELOPMENTS

• Innovations in MEMS Sensors--Global Developments
  • Dissolved Wafer Process for Manufacture of MEMS Pressure Sensors--Integrated Sensing Systems Inc.--USA
  • Nonsilicon-Based Process for MEMS Tactile Sensors--Thailand
  • Vibration Power Harvesting--USA
  • iMEMS and iSensor Technologies--Analog Devices--USA
  • MEMS-Based Capacitive Sensors for RF Communication-- University of Twente--Netherlands
  • Optic Fibers MEMS Pressure sensors--Nanjing Normal University--China
  • MEMS Pressure Sensors for Harsh Environments--Iowa State University--USA
  • Digital Pressure Sensor Technology--Switzerland
  • System-on-Chip for Wireless Sensor Networks--Dust Networks Inc.--USA
  • Passive Wireless Sensors--Georgia Institute of Technology--USA
• Innovations in MEMS Actuators--Global Developments
  • Integrated System for Rotating Microengines--TEGAM Inc.--USA
  • MEMS Silicon Clocks--SiTime Inc.--USA
  • MEMS-Based Industrial Equipment Monitoring--Germany
  • MEMS Gas Turbine Engine--USA
  • Microchip for MEMS Flow Control System--Microstaq Inc.--USA
  • Combustion Driven Fluidic Actuator--Georgia Institute of Technology--USA
  • Microvision Inc.--USA
  • Digital Microfluidics--University of Washington
  • Micromachined Vibratory Gyroscopes--University of Berkley

6 INNOVATIVE DEVELOPMENTS IN MICROMACHINE TOOLS AND PROCESSES

• University Research--World
  • 1st Generation Micromilling--Georgia Institute of Technology--USA
  • 3-Axis MesoMill--MIT--USA
  • Industrial Development and Systems Integration Applications--ITRI--Taiwan
  • Microforming--Extrusion of Micropins--Northwestern University--Illinois
• Corporate Research--USA
  • 4-Axis Micromill--Atometric Inc.
  • Nanowires as Replacements for Lithography--Hewlett Packard
  • 3-Axis Micromill--Micro Machines International Inc.

7 FUNDING ANALYSIS AND WORLD-WIDE INNOVATION ASSESSMENT

• Venture Capital; Public Sector and Company Funding; and SWOT Analysis
  • Venture Capital Funding
  • Public Sector Funding
  • Company Funding and SWOT Analysis
• World-Wide Innovation Assessment
  • USA/Latin America
  • Canada
  • Europe
  • Asia/Pacific

8 PATENTS; PATENT ANALYSIS AND KEY CONTACTS

• Patent Analysis
  • Recent Patents
  • Patent Analysis--Worldwide
• Database of Key Participants
  • Research Contacts
  • Corporate Contacts

9 DECISION SUPPORT DATABASE

• Database Tables
  • Global Semiconductor and Semiconductor Equipment Market--World (1999 to 2006)
  • Machine Tool Production--World (1999 to 2006)
  • PCB Sales--World (1999-2006)
  • Consumer Electronics Contribution to Electronic Industry--World (1999 to 2006)
  • Control and Instrumentation Contribution to the Electronics Industry--World (1999 to 2006)